Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5599397 | Semiconductor wafer process chamber with suspector back coating | Roger N. Anderson, H. Peter W. Hey, Mahalingam Venkatesan | 1997-02-04 |
| 5576059 | Depositing polysilicon films having improved uniformity and apparatus therefor | Mahalingam Venkatesan, Christian M. Gronet | 1996-11-19 |
| 5551982 | Semiconductor wafer process chamber with susceptor back coating | Roger N. Anderson, H. Peter W. Hey, Mahalingam Venkatesan | 1996-09-03 |
| 5352636 | In situ method for cleaning silicon surface and forming layer thereon in same chamber | — | 1994-10-04 |
| 5141892 | Process for depositing highly doped polysilicon layer on stepped surface of semiconductor wafer resulting in enhanced step coverage | — | 1992-08-25 |
| 4975385 | Method of constructing lightly doped drain (LDD) integrated circuit structure | John O. Borland | 1990-12-04 |
| 4446613 | Integrated circuit resistor and method of fabrication | Nan-Hsiung Tsai | 1984-05-08 |
| 4441247 | Method of making MOS device by forming self-aligned polysilicon and tungsten composite gate | Paolo Gargini, Norman C. Ahlquist | 1984-04-10 |