Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9399228 | Method and apparatus for purging and plasma suppression in a process chamber | Patrick Breiling, Kevin Gerber, Jennifer O'Loughlin, Pramod Subramonium | 2016-07-26 |
| 9379210 | Sacrificial pre-metal dielectric for self-aligned contact scheme | Thomas W. Mountsier, Bart J. van Schravendijk, Ananda Banerji | 2016-06-28 |
| 9214334 | High growth rate process for conformal aluminum nitride | Shankar Swaminathan, Ananda Banerji, Adrien LaVoie | 2015-12-15 |
| 9190489 | Sacrificial pre-metal dielectric for self-aligned contact scheme | Thomas W. Mountsier, Bart J. van Schravendijk, Ananda Banerji | 2015-11-17 |
| 9153482 | Methods and apparatus for selective deposition of cobalt in semiconductor processing | Thomas Knisley, Pramod Subramonium | 2015-10-06 |
| 8753978 | Metal and silicon containing capping layers for interconnects | Jengyi Yu, Gengwei Jiang, Pramod Subramonium, Roey Shaviv, Hui-Jung Wu | 2014-06-17 |