Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7329321 | Enhanced wafer cleaning method | Seokmin Yun, John M. Boyd, John deLarios | 2008-02-12 |
| 7294580 | Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition | Seokmin Yun, Ji Zhu, Peter Cirigliano, Sangheon Lee, Thomas S. Choi +4 more | 2007-11-13 |
| 7239737 | User interface for quantifying wafer non-uniformities and graphically explore significance | Jorge Luque, Andrew D. Bailey, III | 2007-07-03 |
| 7022611 | Plasma in-situ treatment of chemically amplified resist | Douglas Keil, Wan-Lin Chen, Eric A. Hudson, S. M. Reza Sadjadi, Andrew D. Bailey, III | 2006-04-04 |
| 6873112 | Method for producing a semiconductor device | Andrew D. Bailey, III | 2005-03-29 |
| 6842147 | Method and apparatus for producing uniform processing rates | Arthur M. Howald, Andras Kuthi, Andrew D. Bailey, III | 2005-01-11 |
| 6744213 | Antenna for producing uniform process rates | Andrew D. Bailey, III | 2004-06-01 |
| 6518705 | Method and apparatus for producing uniform process rates | Andrew D. Bailey, III, Andras Kuthi, Michael G. R. Smith, Alan M. Schoepp | 2003-02-11 |
| 6341574 | Plasma processing systems | Andrew D. Bailey, III, Alan M. Schoepp, David Hemker, Andras Kuthi | 2002-01-29 |