Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9644271 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Yaswanth Rangineni, Adrien LaVoie, Yukinori Sakiyama, Edward Augustyniak +2 more | 2017-05-09 |
| 9478411 | Method to tune TiOx stoichiometry using atomic layer deposited Ti film to minimize contact resistance for TiOx/Ti based MIS contact scheme for CMOS | Shruti Vivek Thombare, Sanjay Gopinath, Reza Arghavani, Michal Danek | 2016-10-25 |
| 9478438 | Method and apparatus to deposit pure titanium thin film at low temperature using titanium tetraiodide precursor | Shruti Vivek Thombare, Sanjay Gopinath, Michal Danek | 2016-10-25 |
| 8343318 | Magnetic lensing to improve deposition uniformity in a physical vapor deposition (PVD) process | Karl Leeser, Alexander Dulkin | 2013-01-01 |