Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12173403 | Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films | Rocio Alejandra Arteaga Muller, Raphael ROCHAT, Antonio Sanchez, Jean-Marc Girard, Nicolas Blasco +3 more | 2024-12-24 |
| 11549182 | Group 6 transition metal-containing compounds for vapor deposition of group 6 transition metal-containing films | Julien Lieffrig, Christian Dussarrat, Antoine COLAS, Jong Min Kim | 2023-01-10 |
| 11162175 | Group 6 transition metal-containing compounds for vapor deposition of group 6 transition metal-containing films | Julien Lieffrig, Christian Dussarrat, Antoine COLAS, Jong Min Kim | 2021-11-02 |
| 11021793 | Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films | Rocio ARTEAGA, Raphael ROCHAT, Antonio Sanchez, Jean-Marc Girard, Nicolas Blasco +3 more | 2021-06-01 |
| 10731251 | Group 6 transition metal-containing compounds for vapor deposition of group 6 transition metal-containing films | Julien Lieffrig, Christian Dussarrat, Antoine COLAS, Jong Min Kim | 2020-08-04 |
| 10648087 | Etching reactants and plasma-free etching processes using the same | Jooho LEE, Jean-Marc Girard, Nicolas Blasco, Satoko Gatineau | 2020-05-12 |
| 10174423 | Niobium-containing film forming compositions and vapor deposition of Niobium-containing films | Jooho LEE, Wontae Noh | 2019-01-08 |
| 10106887 | Group 5 transition metal-containing compounds for vapor deposition of group 5 transition metal-containing films | Wontae Noh, Jooho LEE | 2018-10-23 |
| 10106568 | Hafnium-containing film forming compositions for vapor deposition of hafnium-containing films | Christian Dussarrat, Jean-Marc Girard, Hana Ishii, Julien Lieffrig | 2018-10-23 |
| 10094021 | Group 6 transition metal-containing compounds for vapor deposition of group 6 transition metal-containing films | Julien Lieffrig, Christian Dussarrat, Antoine COLAS, Jong Min Kim | 2018-10-09 |
| 10023462 | Niobium-Nitride film forming compositions and vapor deposition of Niobium-Nitride films | Julien Lieffrig, Jooho LEE, Wontae Noh | 2018-07-17 |
| 9868753 | Germanium- and zirconium-containing composition for vapor deposition of zirconium-containing films | Julien Lieffrig, Hana Ishii, Christian Dussarrat | 2018-01-16 |
| 9790591 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Changhee Ko, Julien Gatineau, Julien Lieffrig, Hana Ishii | 2017-10-17 |
| 9786671 | Niobium-containing film forming compositions and vapor deposition of niobium-containing films | Wontae Noh | 2017-10-10 |
| 9748249 | Tantalum-containing film forming compositions and vapor deposition of tantalum-containing films | Wontae Noh | 2017-08-29 |
| 9691770 | Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films | Wontae Noh | 2017-06-27 |
| 9691771 | Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films | Wontae Noh | 2017-06-27 |
| 9663547 | Silicon- and Zirconium-containing compositions for vapor deposition of Zirconium-containing films | Julien Lieffrig, Hana Ishii, Christian Dussarrat | 2017-05-30 |
| 9518075 | Group 5 cyclopentadienyl transition metal-containing precursors for deposition of group 5 transition metal-containing films | Wontae Noh | 2016-12-13 |
| 9499571 | Germanium- and zirconium-containing compositions for vapor deposition of zirconium-containing films | Julien Lieffrig, Hana Ishii, Christian Dussarrat | 2016-11-22 |
| 9416443 | Method for the deposition of a ruthenium containing film using arene diazadiene ruthenium(0) precursors | Julien Gatineau | 2016-08-16 |
| 9206507 | Nickel bis diazabutadiene precursors, their synthesis, and their use for nickel containing films depositions | Julien Gatineau, Benjamin Jurcik | 2015-12-08 |
| 9121093 | Bis-ketoiminate copper precursors for deposition of copper-containing films and methods thereof | Christian Dussarrat, Vincent M. Omarjee, Andrey V. Korolev | 2015-09-01 |
| 9099301 | Preparation of lanthanum-containing precursors and deposition of lanthanum-containing films | — | 2015-08-04 |
| 9034761 | Heteroleptic (allyl)(pyrroles-2-aldiminate) metal-containing precursors, their synthesis and vapor deposition thereof to deposit metal-containing films | Andrey V. Korolev | 2015-05-19 |