Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7098457 | Electron beam apparatus and device manufacturing method using same | Yuichiro Yamazaki, Kenji Watanabe, Masahiro Hatakeyama, Tohru Satake, Nobuharu Noji | 2006-08-29 |
| 7075072 | Detecting apparatus and device manufacturing method | Masahiro Hatakeyama, Takeshi Murakami, Tohru Satake, Nobuharu Noji, Yuichiro Yamazaki | 2006-07-11 |
| 6992290 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa +7 more | 2006-01-31 |
| 6909092 | Electron beam apparatus and device manufacturing method using same | Yuichiro Yamazaki, Kenji Watanabe, Masahiro Hatakeyama, Tohru Satake, Nobuharu Noji | 2005-06-21 |
| 6563114 | Substrate inspecting system using electron beam and substrate inspecting method using electron beam | Yuuichiro Yamazaki, Takamitsu Nagai, Motosuke Miyoshi | 2003-05-13 |