Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563114 | Substrate inspecting system using electron beam and substrate inspecting method using electron beam | Ichirota Nagahama, Takamitsu Nagai, Motosuke Miyoshi | 2003-05-13 |
| 6414323 | Charged particle beam apparatus and method of controlling charged particle beam | Hideaki Abe, Motosuke Miyoshi | 2002-07-02 |