Issued Patents All Time
Showing 51–75 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D682842 | Display panel or screen with a graphical user interface | Tohru Kurata, Wataru Tajika, Masayuki Ebisawa, Goro Takaki, Ryuji Nakayama | 2013-05-21 |
| 8347332 | Information processing apparatus, information processing method, program, information providing apparatus, information providing method, and information processing system | Kazuhiro Fukuda | 2013-01-01 |
| 8275130 | System and method for registering secret key | Hiroaki Iwashita, Kouhei Kishimoto, Yuuki Nawa, Yoshiyuki Mizuno, Hiromitsu Mizuno +4 more | 2012-09-25 |
| 8122848 | Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices | — | 2012-02-28 |
| 7973907 | Method for treating substrate, method for conveying substrate, and apparatus for conveying substrate | Kentaro Matsunaga, Seiro Miyoshi, Eishi Shiobara | 2011-07-05 |
| 7968272 | Semiconductor device manufacturing method to form resist pattern | Eishi Shiobara, Tomoyuki Takeishi, Kei Hayasaki, Yasunobu Onishi, Shinichi Ito +1 more | 2011-06-28 |
| 7794923 | Substrate processing method, substrate processing apparatus, and manufacturing method of semiconductor device | Eishi Shiobara, Kentaro Matsunaga, Tomoyuki Takeishi, Kei Hayasaki, Shinichi Ito | 2010-09-14 |
| 7794922 | Pattern forming method and method of manufacturing semiconductor device | Shinichi Ito, Kentaro Matsunaga, Yasunobu Onishi | 2010-09-14 |
| 7749665 | Method of generating writing pattern, method of forming resist pattern, method of controlling exposure tool, and method of manufacturing semiconductor device | Shinichi Ito | 2010-07-06 |
| 7742150 | Manufacturing method of semiconductor device | Shinichi Ito, Kentaro Matsunaga | 2010-06-22 |
| 7687227 | Resist pattern forming method and manufacturing method of semiconductor device | Eishi Shiobara, Yasunobu Onishi, Shinichi Ito | 2010-03-30 |
| 7685556 | Mask data correction method, photomask manufacturing method, computer program, optical image prediction method, resist pattern shape prediction method, and semiconductor device manufacturing method | Kazuya Fukuhara, Shoji Mimotogi | 2010-03-23 |
| 7662546 | Apparatus for processing substrate and method of processing the same | Kenji Kawano, Shinichi Ito, Eishi Shiobara, Kei Hayasaki | 2010-02-16 |
| 7662543 | Pattern forming method and method of manufacturing semiconductor device | Shinichi Ito | 2010-02-16 |
| 7652747 | Immersion exposure method and immersion exposure apparatus which transfer image of pattern formed on mask onto substrate through immersion medium | Takuya Kono, Kazuya Fukuhara | 2010-01-26 |
| 7638001 | Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices | — | 2009-12-29 |
| 7630053 | Method of manufacturing semiconductor device and liquid immersion lithography system | — | 2009-12-08 |
| 7505279 | Portable device having flexible case | Kiyokazu Ohtaki, Seiji Ishigaki, Masayuki Kawamura | 2009-03-17 |
| 7466216 | Security control system | Akihito Kimura, Keiji Yamamoto, Koichi Masamura, Takao Ozawa, Yoshihide Nakane | 2008-12-16 |
| 7459264 | Device manufacturing method | Akiko Mimotogi, Takashi Sato | 2008-12-02 |
| 7432796 | Security control system for managing registration of ID codes for portable devices | Kiyokazu Ohtaki, Keiji Yamamoto, Koichi Masamura, Takao Ozawa, Yoshihide Nakane | 2008-10-07 |
| 7336341 | Simulator of lithography tool for correcting focus error and critical dimension, simulation method for correcting focus error and critical dimension, and computer medium for storing computer program for simulator | Shoji Mimotogi, Akiko Yamada | 2008-02-26 |
| 7227447 | Switch device | Kiyokazu Ohtaki, Takayuki Hiramitsu, Tomoyuki Funayama, Koji Iwamoto | 2007-06-05 |
| 7199710 | Controller for remote control system | Takayuki Hiramitsu, Masayuki Kawamura, Kiyokazu Ohtaki, Yoshihito Mizuno, Hiroyasu Hasegawa +5 more | 2007-04-03 |
| 7075098 | Method of selecting pattern to be measured, pattern inspection method, manufacturing method of semiconductor device, program, and pattern inspection apparatus | Takahiro Ikeda, Hisako Aoyama | 2006-07-11 |