Issued Patents All Time
Showing 76–82 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7026099 | Pattern forming method and method for manufacturing semiconductor device | Hirokazu Kato, Yasunobu Onishi, Eishi Shiobara, Hiroko Nakamura | 2006-04-11 |
| 7005249 | Apparatus for processing substrate and method of processing the same | Kenji Kawano, Shinichi Ito, Eishi Shiobara, Kei Hayasaki | 2006-02-28 |
| 7005238 | Apparatus for processing substrate and method of processing the same | Kenji Kawano, Shinichi Ito, Eishi Shiobara, Kei Hayasaki | 2006-02-28 |
| 6881058 | Apparatus for processing substrate and method of processing the same | Kenji Kawano, Shinichi Ito, Eishi Shiobara, Kei Hayasaki | 2005-04-19 |
| 6841404 | Method for determining optical constant of antireflective layer, and method for forming resist pattern | Eishi Shiobara | 2005-01-11 |
| 6627356 | Photomask used in manufacturing of semiconductor device, photomask blank, and method of applying light exposure to semiconductor wafer by using said photomask | Hiroshi Nomura | 2003-09-30 |
| 6558853 | Method for manufacturing exposure mask, exposure apparatus and semiconductor device | — | 2003-05-06 |