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106
Patents All Time

Issued Patents All Time

Showing 51–75 of 106 patents

Patent #TitleCo-InventorsDate
7746471 Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems Blaine D. Johs, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch 2010-06-29
7746472 Automated ellipsometer and the like systems Blaine D. Johs, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch 2010-06-29
7738105 System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems Martin M. Liphardt, James D. Welch 2010-06-15
7717679 Structure of balancing fan 2010-05-18
7671989 Information maintenance during intensity attenuation in focused beams Martin M. Liphardt 2010-03-02
7633625 Spectroscopic ellipsometer and polarimeter systems John A. Woollam, Blaine D. Johs, Craig M. Herzinger, Martin M. Liphardt, Galen L. Pfeiffer 2009-12-15
7623238 System for and method of reducing change caused by motor vibrations in ellipsometers, polarimeters or the like Martin M. Liphardt 2009-11-24
7623237 Sample investigating system Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger +3 more 2009-11-24
7616319 Spectroscopic ellipsometer and polarimeter systems John A. Woollam, Blaine D. Johs, Craig M. Herzinger, Martin M. Liphardt, Galen L. Pfeiffer 2009-11-10
7567345 Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample Martin M. Liphardt, Brooks A. Hitt, Jeffrey S. Hale 2009-07-28
7554662 Spatial filter means comprising an aperture with a non-unity aspect ratio in a system for investigating samples with electromagnetic radiation Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger 2009-06-30
7535566 Beam chromatic shifting and directing means Blaine D. Johs, Galen L. Pfeiffer, Jeffrey S. Hale, Christopher A. Goeden, Brian D. Guenther +1 more 2009-05-19
7522279 System for and method of investigating the exact same point on a sample substrate with multiple wavelengths Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger, Christopher A. Goeden, John A. Woollam +1 more 2009-04-21
7508510 System for and method of investigating the exact same point on a sample substrate with multiple wavelengths Galen L. Pfeiffer, Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger, Christopher A. Goeden +2 more 2009-03-24
7505134 Automated ellipsometer and the like systems Blaine D. Johs, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch 2009-03-17
7492455 Discrete polarization state spectroscopic ellipsometer system and method of use Blaine D. Johs, Martin M. Liphardt, Jeffrey S. Hale 2009-02-17
7489400 System and method of applying xenon arc-lamps to provide 193 nm wavelengths Martin M. Liphardt, James D. Welch 2009-02-10
7468794 Rotating compensator ellipsometer system with spatial filter equivalent Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger 2008-12-23
7336361 Spectroscopic ellipsometer and polarimeter systems Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green +1 more 2008-02-26
7327456 Spectrophotometer, ellipsometer, polarimeter and the like systems John A. Woollam, Steven E. Green, Blaine D. Johs, Craig M. Herzinger, Galen L. Pfeiffer +3 more 2008-02-05
7317529 Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples Martin M. Liphardt, Blaine D. Johs, Galen L. Pfeiffer, James D. Welch, John A. Woollam 2008-01-08
7317530 Combined spatial filter and relay systems Martin M. Liphardt 2008-01-08
7304737 Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green +1 more 2007-12-04
7301631 Control of uncertain angle of incidence of beam from Arc lamp Blaine D. Johs, Galen L. Pfeiffer, Steven E. Green, Christopher A. Goeden, Martin M. Liphardt 2007-11-27
7277171 Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems Blaine D. Johs, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch 2007-10-02