Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405210 | System for, and calibration and testing of directed beam ellipsometer systems | Ping He, Martin M. Liphardt | 2025-09-02 |
| 12332163 | System for, and calibration and testing of directed beam ellipsometer systems | Ping He, Martin M. Liphardt | 2025-06-17 |
| 11885738 | Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meet the scheimpflug condition and overcomes keystone error | Martin M. Liphardt, Ping He | 2024-01-30 |
| 10989601 | Beam focusing and reflective optics | Martin M. Liphardt, Jeffrey S. Hale, Ping He, Craig M. Herzinger | 2021-04-27 |
| 10859439 | Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meets scheimpflug condition and overcomes keystone error | Martin M. Lihardt, Ping He | 2020-12-08 |
| 10775298 | Ellipsometer or polarimeter system having at least one rotating element which is driven by a motor comprising air bearing | Christopher D. Hassler, Jeffrey S. Hale, Craig M. Herzinger, Brian D. Guenther, Brooks A. Hitt | 2020-09-15 |
| 10444140 | Theta-theta sample positioning stage with application to sample mapping using reflectometer, spectrophotometer or ellipsometer system | Griffin A. P. Hovorka, Martin M. Liphardt | 2019-10-15 |
| 10338362 | Beam focusing and reflecting optics with enhanced detector system | Martin M. Liphardt, Jeffrey S. Hale, Ping He, Duane E. Meyer | 2019-07-02 |
| 10018815 | Beam focusing and reflective optics | Martin M. Liphardt, Jeffrey S. Hale, Ping He | 2018-07-10 |
| 9921395 | Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area | Martin M. Liphardt, Jeffrey S. Hale, Ping He | 2018-03-20 |
| 9658151 | System for viewing samples that are undergoing ellipsometric investigation in real time | Martin M. Liphardt | 2017-05-23 |
| 9500843 | Beam focusing and beam collecting optics | Martin M. Liphardt, Jeffrey S. Hale, Ping He | 2016-11-22 |
| 9442016 | Reflective focusing optics | Martin M. Liphardt, Jeffrey S. Hale, Ping He | 2016-09-13 |
| 9360369 | System for determining average ellipsometric parameters for planar or non-planar shaped objects, and method of its use | Martin M. Liphardt | 2016-06-07 |
| 9347768 | In line ellipsometer system and method of use | Blaine D. Johs, Brian D. Guenther, Martin M. Liphardt, Jeffrey S. Hale | 2016-05-24 |
| 8953030 | System for viewing samples that are undergoing ellipsometric investigation in real time | Martin M. Liphardt | 2015-02-10 |
| 8749782 | DLP base small spot investigation system | Martin M. Liphardt | 2014-06-10 |
| 8531665 | Small volume cell | Thomas E. Tiwald | 2013-09-10 |
| 8493565 | Small volume cell | Thomas E. Tiwald, Martin M. Liphardt | 2013-07-23 |
| 8436994 | Fast sample height, AOI and POI alignment in mapping ellipsometer or the like | Martin M. Liphardt, Jeffrey S. Hale, Ping He | 2013-05-07 |
| 8130375 | Small volume cell | Thomas E. Tiwald, Martin M. Liphardt | 2012-03-06 |
| 7872751 | Fast sample height, AOI and POI alignment in mapping ellipsometer or the like | Martin M. Liphardt, Jeffrey S. Hale, Ping He | 2011-01-18 |
| 7830512 | System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters | Martin M. Liphardt | 2010-11-09 |
| 7821637 | System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizing | Martin M. Liphardt, James N. Hilfiker | 2010-10-26 |
| 7817266 | Small volume cell | Thomas E. Tiwald | 2010-10-19 |