Issued Patents All Time
Showing 1–25 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9354118 | Multiple wavelength ellipsometer system and related method | Bruce A. Hadwiger | 2016-05-31 |
| 9347768 | In line ellipsometer system and method of use | Galen L. Pfeiffer, Brian D. Guenther, Martin M. Liphardt, Jeffrey S. Hale | 2016-05-24 |
| 8638437 | System and method of aligning a sample | Martin M. Liphardt | 2014-01-28 |
| 8467057 | Ellipsometers and polarimeters comprising polarization state compensating beam directing sample wobble compensating system, and method of use | Ping He | 2013-06-18 |
| 8462341 | Mounting for deviation angle self compensating substantially achromatic retarder | Ping He, Steven E. Green, Craig M. Herzinger, Duane E. Meyer, Martin M. Liphardt | 2013-06-11 |
| 8339603 | Mapping ellipsometers and polarimeters comprising polarization state compensating beam directing means, and method of use | Martin M. Liphardt | 2012-12-25 |
| 8248606 | Sample mapping in environmental chamber | Martin M. Liphardt | 2012-08-21 |
| 8248607 | Empirical correction for spectroscopic ellipsometric measurements of rough or textured surfaces | Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann | 2012-08-21 |
| 8223334 | Method of improving ellipsometric and the like data | Martin M. Liphardt | 2012-07-17 |
| 8159672 | Sample investigating system and method of use | Martin M. Liphardt, Thomas E. Tiwald, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green +3 more | 2012-04-17 |
| 8064055 | System and method of aligning a sample | Martin H. Liphardt | 2011-11-22 |
| 8013996 | Spatial filter in sample investigation system | Martin M. Liphardt, Ping He, Craig M. Herzinger | 2011-09-06 |
| 7907280 | Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation | Steven E. Green, Craig M. Herzinger, Duane E. Meyer, Martin M. Liphardt | 2011-03-15 |
| 7796260 | System and method of controlling intensity of an electromagnetic beam | Christopher A. Goeden, Galen L. Pfeiffer | 2010-09-14 |
| 7746471 | Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems | Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch | 2010-06-29 |
| 7746472 | Automated ellipsometer and the like systems | Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch | 2010-06-29 |
| 7705995 | Method of determining substrate etch depth | Jeffrey S. Hale | 2010-04-27 |
| 7633625 | Spectroscopic ellipsometer and polarimeter systems | John A. Woollam, Craig M. Herzinger, Ping He, Martin M. Liphardt, Galen L. Pfeiffer | 2009-12-15 |
| 7623237 | Sample investigating system | Martin M. Liphardt, Thomas E. Tiwald, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green +3 more | 2009-11-24 |
| 7616319 | Spectroscopic ellipsometer and polarimeter systems | John A. Woollam, Craig M. Herzinger, Ping He, Martin M. Liphardt, Galen L. Pfeiffer | 2009-11-10 |
| 7554662 | Spatial filter means comprising an aperture with a non-unity aspect ratio in a system for investigating samples with electromagnetic radiation | Martin M. Liphardt, Ping He, Craig M. Herzinger | 2009-06-30 |
| 7535566 | Beam chromatic shifting and directing means | Galen L. Pfeiffer, Jeffrey S. Hale, Christopher A. Goeden, Brian D. Guenther, Martin M. Liphardt +1 more | 2009-05-19 |
| 7522279 | System for and method of investigating the exact same point on a sample substrate with multiple wavelengths | Martin M. Liphardt, Craig M. Herzinger, Ping He, Christopher A. Goeden, John A. Woollam +1 more | 2009-04-21 |
| 7508510 | System for and method of investigating the exact same point on a sample substrate with multiple wavelengths | Galen L. Pfeiffer, Martin M. Liphardt, Craig M. Herzinger, Christopher A. Goeden, Ping He +2 more | 2009-03-24 |
| 7505134 | Automated ellipsometer and the like systems | Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch | 2009-03-17 |