Issued Patents All Time
Showing 51–75 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7193710 | Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses | Martin M. Liphardt, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2007-03-20 |
| 7167241 | Dielectric function of thin metal films determined by combined transmission spectroscopic ellipsometry and intensity measurements | Gregory K. Pribil | 2007-01-23 |
| 7158231 | Spectroscopic ellipsometer and polarimeter systems | John A. Woollam, Craig M. Herzinger, Ping He, Martin M. Liphardt, Galen L. Pfeiffer | 2007-01-02 |
| 7136172 | System and method for setting and compensating errors in AOI and POI of a beam of EM radiation | Christopher A. Goeden, Galen L. Pfeiffer, Martin M. Liphardt | 2006-11-14 |
| 7099006 | Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing means | Galen L. Pfeiffer, Jeffrey S. Hale, Christopher A. Goeden | 2006-08-29 |
| 7075649 | Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration | Craig M. Herzinger, Steven E. Green, Jeffrey S. Hale | 2006-07-11 |
| 7075650 | Discrete polarization state spectroscopic ellipsometer system and method of use | Martin M. Liphardt, Ping He, Jeffrey S. Hale | 2006-07-11 |
| 7057717 | System for and method of investigating the exact same point on a sample substrate with at least two wavelengths | Martin M. Liphardt, Craig M. Herzinger, Ping He, Christopher A. Goeden, John A. Woollam +1 more | 2006-06-06 |
| 7025501 | Tracking temperature change in birefringent materials | Miroslav Micovic | 2006-04-11 |
| 6982792 | Spectrophotometer, ellipsometer, polarimeter and the like systems | John A. Woollam, Steven E. Green, Ping He, Craig M. Herzinger, Galen L. Pfeiffer +2 more | 2006-01-03 |
| 6950182 | Functional equivalent to spatial filter in ellipsometer and the like systems | Martin M. Liphardt, Craig M. Herzinger, Ping He | 2005-09-27 |
| 6940595 | Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters | Jeffrey S. Hale, John A. Woollam, Craig M. Herzinger | 2005-09-06 |
| 6937341 | System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation | John A. Woollam, Galen L. Pfeiffer, Daniel W. Thompson, Craig M. Herzinger | 2005-08-30 |
| 6930813 | Spatial filter source beam conditioning in ellipsometer and the like systems | Martin M. Liphardt, Craig M. Herzinger, Ping He, James D. Welch | 2005-08-16 |
| 6859278 | Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems | Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch | 2005-02-22 |
| 6822738 | Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system | Craig M. Herzinger | 2004-11-23 |
| 6804004 | Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry | Craig M. Herzinger, Ping He, Martin M. Liphardt | 2004-10-12 |
| 6795184 | Odd bounce image rotation system in ellipsometer systems | Craig M. Herzinger, Steven E. Green | 2004-09-21 |
| 6741353 | Spectroscopic ellipsometry analysis of object coatings during deposition | — | 2004-05-25 |
| 6636309 | Application of spectroscopic ellipsometry to in situ real time fabrication of multiple alternating high/low refractive index narrow bandpass optical filters | Jeffrey S. Hale | 2003-10-21 |
| 6590655 | System and method of improving electromagnetic radiation beam characteristics in ellipsometer and the like systems | James D. Welch, Martin M. Liphardt, Ping He | 2003-07-08 |
| 6549282 | Methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipsometry and polarimetry systems | Craig M. Herzinger, Ping He, Martin M. Ciphardt | 2003-04-15 |
| 6483586 | Beam splitting analyzer means in rotating compensator ellipsometer | Craig M. Herzinger, Steven E. Green, Jeffrey S. Hale | 2002-11-19 |
| 6456376 | Rotating compensator ellipsometer system with spatial filter | Martin M. Liphardt, Craig M. Herzinger, Ping He | 2002-09-24 |
| 6353477 | Regression calibrated spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system | Craig M. Herzinger | 2002-03-05 |