Issued Patents All Time
Showing 26–50 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7492455 | Discrete polarization state spectroscopic ellipsometer system and method of use | Martin M. Liphardt, Ping He, Jeffrey S. Hale | 2009-02-17 |
| 7483148 | Ellipsometric investigation of very thin films | — | 2009-01-27 |
| 7468794 | Rotating compensator ellipsometer system with spatial filter equivalent | Martin M. Liphardt, Craig M. Herzinger, Ping He | 2008-12-23 |
| 7460230 | Deviation angle self compensating substantially achromatic retarder | Steven E. Green, Craig M. Herzinger, Duane E. Meyer | 2008-12-02 |
| 7450231 | Deviation angle self compensating substantially achromatic retarder | Steven E. Green, Craig M. Herzinger, Duane E. Meyer | 2008-11-11 |
| 7385697 | Sample analysis methodology utilizing electromagnetic radiation | John A. Woollam, Corey L. Bungay, Thomas E. Tiwald, Martin M. Liphardt, Ronald A. Synowicki +3 more | 2008-06-10 |
| 7362435 | Method of determining initial thickness value for sample surface layer, and use of splines for fitting ellipsometric data | Jeffrey S. Hale | 2008-04-22 |
| 7349092 | System for reducing stress induced effects during determination of fluid optical constants | Thomas E. Tiwald, John A. Woollam, Galen L. Pfeiffer, Craig M. Herzinger | 2008-03-25 |
| 7345762 | Control of beam spot size in ellipsometer and the like systems | Martin M. Liphardt, John A. Woollam, Duane E. Meyer, James D. Welch | 2008-03-18 |
| 7336361 | Spectroscopic ellipsometer and polarimeter systems | Martin M. Liphardt, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2008-02-26 |
| 7327456 | Spectrophotometer, ellipsometer, polarimeter and the like systems | John A. Woollam, Steven E. Green, Ping He, Craig M. Herzinger, Galen L. Pfeiffer +3 more | 2008-02-05 |
| 7317529 | Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples | Martin M. Liphardt, Ping He, Galen L. Pfeiffer, James D. Welch, John A. Woollam | 2008-01-08 |
| 7307724 | Method of reducing the effect of noise in determining the value of a dependent variable | Martin M. Liphardt | 2007-12-11 |
| 7304737 | Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence | Martin M. Liphardt, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2007-12-04 |
| 7301631 | Control of uncertain angle of incidence of beam from Arc lamp | Ping He, Galen L. Pfeiffer, Steven E. Green, Christopher A. Goeden, Martin M. Liphardt | 2007-11-27 |
| 7295313 | Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters | Jeffrey S. Hale, John A. Woollam, Craig M. Herzinger | 2007-11-13 |
| 7283234 | Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal from a substrate surface | John A. Woollam, Thomas E. Tiwald, Martin M. Liphardt, James D. Welch | 2007-10-16 |
| 7277171 | Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems | Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch | 2007-10-02 |
| 7274450 | Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems | Steven E. Green, Ping He, Galen L. Pfeiffer, Brian D. Guenther, Gerald T. Cooney +3 more | 2007-09-25 |
| 7268876 | General virtual interface algorithm for in-situ spectroscopic ellipsometric data analysis | — | 2007-09-11 |
| 7265838 | Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like | Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch | 2007-09-04 |
| 7245376 | Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter | Martin M. Liphardt, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2007-07-17 |
| 7215424 | Broadband ellipsometer or polarimeter system including at least one multiple element lens | Martin M. Liphardt, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2007-05-08 |
| 7215423 | Control of beam spot size in ellipsometer and the like systems | Martin M. Liphardt, John A. Woollam, James D. Welch | 2007-05-08 |
| 7193710 | Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses | Martin M. Liphardt, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2007-03-20 |