Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11675208 | Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system | Stefan Schoeche, Martin M. Liphardt, Ping He, Jeremy A. Van Derslice, Craig M. Herzinger +4 more | 2023-06-13 |
| 10989601 | Beam focusing and reflective optics | Martin M. Liphardt, Ping He, Galen L. Pfeiffer, Craig M. Herzinger | 2021-04-27 |
| 10775298 | Ellipsometer or polarimeter system having at least one rotating element which is driven by a motor comprising air bearing | Christopher D. Hassler, Galen L. Pfeiffer, Craig M. Herzinger, Brian D. Guenther, Brooks A. Hitt | 2020-09-15 |
| 10338362 | Beam focusing and reflecting optics with enhanced detector system | Martin M. Liphardt, Ping He, Galen L. Pfeiffer, Duane E. Meyer | 2019-07-02 |
| 10175160 | Method to analyze spectroscopic ellipsometry or intensity data of porous samples utilizing the anisotropic bruggeman-effective medium theory | Stefan Schoeche, Jeremy A. Van Derslice, Craig M. Herzinger | 2019-01-08 |
| 10061068 | Deviation angle self-compensating substantially achromatic retarder | Craig M. Herzinger, Ping He | 2018-08-28 |
| 10018815 | Beam focusing and reflective optics | Martin M. Liphardt, Ping He, Galen L. Pfeiffer | 2018-07-10 |
| 9976902 | Method to analyze spectroscopic ellipsometry data of porous samples utilizing the anisotropic Bruggeman-effective medium theory | Stefan Schoeche, Jeremy A. Van Derslice, Craig M. Herzinger | 2018-05-22 |
| 9952141 | Method of characterizing a beam of electromagnetic radiation in ellipsometer and the like systems | Craig M. Herzinger, Martin M. Liphardt | 2018-04-24 |
| 9921395 | Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area | Martin M. Liphardt, Ping He, Galen L. Pfeiffer | 2018-03-20 |
| 9500843 | Beam focusing and beam collecting optics | Martin M. Liphardt, Ping He, Galen L. Pfeiffer | 2016-11-22 |
| 9442016 | Reflective focusing optics | Martin M. Liphardt, Ping He, Galen L. Pfeiffer | 2016-09-13 |
| 9347768 | In line ellipsometer system and method of use | Galen L. Pfeiffer, Blaine D. Johs, Brian D. Guenther, Martin M. Liphardt | 2016-05-24 |
| 8436994 | Fast sample height, AOI and POI alignment in mapping ellipsometer or the like | Martin M. Liphardt, Ping He, Galen L. Pfeiffer | 2013-05-07 |
| 8159672 | Sample investigating system and method of use | Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Craig M. Herzinger, Steven E. Green +3 more | 2012-04-17 |
| 7872751 | Fast sample height, AOI and POI alignment in mapping ellipsometer or the like | Martin M. Liphardt, Ping He, Galen L. Pfeiffer | 2011-01-18 |
| 7705995 | Method of determining substrate etch depth | Blaine D. Johs | 2010-04-27 |
| 7623237 | Sample investigating system | Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Craig M. Herzinger, Steven E. Green +3 more | 2009-11-24 |
| 7567345 | Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample | Martin M. Liphardt, Brooks A. Hitt, Ping He | 2009-07-28 |
| 7535566 | Beam chromatic shifting and directing means | Blaine D. Johs, Galen L. Pfeiffer, Christopher A. Goeden, Brian D. Guenther, Martin M. Liphardt +1 more | 2009-05-19 |
| 7492455 | Discrete polarization state spectroscopic ellipsometer system and method of use | Blaine D. Johs, Martin M. Liphardt, Ping He | 2009-02-17 |
| 7362435 | Method of determining initial thickness value for sample surface layer, and use of splines for fitting ellipsometric data | Blaine D. Johs | 2008-04-22 |
| 7336361 | Spectroscopic ellipsometer and polarimeter systems | Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2008-02-26 |
| 7304737 | Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence | Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2007-12-04 |
| 7295313 | Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters | Blaine D. Johs, John A. Woollam, Craig M. Herzinger | 2007-11-13 |