Issued Patents All Time
Showing 76–100 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6268917 | Combined polychromatic electromagnetic beam source system with application to ellipsometers, spectrophotometers and polarimeters | — | 2001-07-31 |
| 6141102 | Single trianglular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems | Craig M. Herzinger, Steven E. Green | 2000-10-31 |
| 6118537 | Multiple tipped berek plate optical retarder elements for use in spectroscopic ellipsometer and polarimeter systems | Craig M. Herzinger, Steven E. Green | 2000-09-12 |
| 6100981 | Dual horizontally oriented triangle shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems | Craig M. Herzinger, Steven E. Green | 2000-08-08 |
| 6084674 | Parallelogram shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems | Craig M. Herzinger, Steven E. Green | 2000-07-04 |
| 6084675 | Adjustable beam alignment compensator/retarder with application in spectroscopic ellipsometer and polarimeter systems | Craig M. Herzinger | 2000-07-04 |
| 6034777 | Methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for window retardence, in ellipsometer and polarimeter systems | Craig M. Herzinger | 2000-03-07 |
| 5969818 | Beam folding optics system and method of use with application in ellipsometry and polarimetry | Ping He | 1999-10-19 |
| 5963327 | Total internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, polarimeter, reflectometer and the like systems | Ping He, Craig M. Herzinger | 1999-10-05 |
| 5963325 | Dual vertically oriented triangular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems | Craig M. Herzinger, Steven E. Green | 1999-10-05 |
| 5956145 | System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems | Steven E. Green, Craig M. Herzinger, John A. Woollam, Stephen P. Ducharme | 1999-09-21 |
| 5946098 | Optical elements for use in spectroscopic ellipsometer and polarimeter systems | Craig M. Herzinger, Steven E. Green | 1999-08-31 |
| 5936734 | Analysis of partially polarized electromagnetic radiation in ellipsometer and polarimeter systems | Craig M. Herzinger | 1999-08-10 |
| 5929993 | Total film retardance monitoring system, and method of use | — | 1999-07-27 |
| 5929995 | System and method for directing electromagnetic beams | — | 1999-07-27 |
| 5872630 | Regression calibrated spectroscopic rotating compensator ellipsometer system with photo array detector | Daniel W. Thompson | 1999-02-16 |
| 5805285 | Multiple order dispersive optics system and method of use | Ping He, Steven E. Green, Shakil A. Pittal, John A. Woollam | 1998-09-08 |
| 5796983 | Dielectric function parametric model, and method of use | Craig M. Herzinger | 1998-08-18 |
| 5757494 | System and method for improving data acquisition capability in spectroscopic ellipsometers | Steven E. Green, Craig M. Herzinger, John A. Woollam | 1998-05-26 |
| 5706212 | Infrared ellipsometer/polarimeter system, method of calibration, and use thereof | Daniel W. Thompson | 1998-01-06 |
| 5666201 | Multiple order dispersive optics system and method of use | Ping He, Steven E. Green, Shakil A. Pittal, John A. Woollam | 1997-09-09 |
| 5657126 | Ellipsometer | Stephen P. Ducharme, Hassanayn Machlab El Hajj, John A. Woollam | 1997-08-12 |
| 5582646 | Ellipsometer/polarimeter based process monitor and control system suitable for simultaneous retrofit on molecular beam epitaxy system RHEED/LEED interface system, and method of use | John A. Woollam, Peter Chow | 1996-12-10 |
| 5521706 | System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system | Steven E. Green, Shakil A. Pittal, John A. Woollam, David Doerr, Reed A. Christenson | 1996-05-28 |
| 5504582 | System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system | Shakil A. Pittal, Steven E. Green, John A. Woollam, David Doerr, Reed A. Christenson | 1996-04-02 |