Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10808317 | Deposition apparatus including an isothermal processing zone | Ramesh Chandrasekharan, Karl Leeser, Alan M. Schoepp | 2020-10-20 |
| 10781516 | Chemical deposition chamber having gas seal | Ramesh Chandrasekharan, Saangrut Sangplung | 2020-09-22 |
| 10619245 | Hollow cathode discharge (HCD) suppressing capacitively coupled plasma electrode and gas distribution faceplate | Edward Augustyniak | 2020-04-14 |
| 10442721 | Microgravity-based method and system for fabricating optical fibers | Dennis S. Tucker | 2019-10-15 |
| 10217614 | Ceramic gas distribution plate with embedded electrode | Ramkishan Rao Lingampalli, Tony Kaushal | 2019-02-26 |
| 10077497 | Hollow cathode discharge (HCD) suppressing capacitively coupled plasma electrode and gas distribution faceplate | Edward Augustyniak | 2018-09-18 |
| 9875883 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Yaswanth Rangineni, Douglas Keil, Edward Augustyniak, Sunil Kapoor | 2018-01-23 |
| 9754769 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Yaswanth Rangineni, Douglas Keil, Edward Augustyniak, Sunil Kapoor | 2017-09-05 |
| 9490149 | Chemical deposition apparatus having conductance control | Ramesh Chandrasekharan, Karl Leeser, Chunguang Xia | 2016-11-08 |