Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412275 | Pattern matching device, pattern measurement system, and non-transitory computer-readable medium | Liang Li, Yuichi Abe | 2025-09-09 |
| 11669953 | Pattern matching device and computer program for pattern matching | Yuichi Abe, Mitsuji Ikeda | 2023-06-06 |
| 10535129 | Pattern matching apparatus and computer program | Masahiro Kitazawa, Mitsuji Ikeda, Yuichi Abe, Junichi Taguchi | 2020-01-14 |
| 10255519 | Inspection apparatus and method using pattern matching | Yuichi Abe | 2019-04-09 |
| 9619727 | Matching process device, matching process method, and inspection device employing same | Yuichi Abe, Hiroyuki Ushiba | 2017-04-11 |
| 8971627 | Template matching processing device and template matching processing program | Jun'ichi Taguchi, Mitsuji Ikeda, Yuichi Abe, Masahiro Kitazawa | 2015-03-03 |
| 8885950 | Pattern matching method and pattern matching apparatus | Yuichi Abe, Mitsuji Ikeda | 2014-11-11 |
| 8881067 | Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device | Atsushi Miyamoto, Hidetoshi Morokuma | 2014-11-04 |
| RE45224 | Method and apparatus for creating imaging recipe | Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani | 2014-10-28 |
| RE45204 | Method and apparatus for creating imaging recipe | Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani | 2014-10-21 |
| 8853630 | Scanning electron microscope and a method for imaging a specimen using the same | Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma | 2014-10-07 |
| 8642957 | Scanning electron microscope and a method for imaging a specimen using the same | Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma | 2014-02-04 |
| 8356260 | Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device | Atsushi Miyamoto, Hidetoshi Morokuma | 2013-01-15 |
| 8214166 | Method and its system for calibrating measured data between different measuring tools | Maki Tanaka | 2012-07-03 |
| 8158938 | Scanning electron microscope and a method for imaging a specimen using the same | Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma | 2012-04-17 |
| 7816062 | Method and apparatus for semiconductor device production process monitoring and method and apparatus for estimating cross sectional shape of a pattern | Hidetoshi Morokuma, Atsushi Miyamoto, Hideaki Sasazawa | 2010-10-19 |
| 7685560 | Method and apparatus for monitoring exposure process | Chie Shishido, Hidetoshi Morokuma | 2010-03-23 |
| 7633061 | Method and apparatus for measuring pattern dimensions | Maki Tanaka, Chie Shishido | 2009-12-15 |
| 7615746 | Method and apparatus for evaluating pattern shape of a semiconductor device | Atsushi Miyamoto, Ryoichi Matsuoka | 2009-11-10 |
| 7559047 | Method and apparatus for creating imaging recipe | Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani | 2009-07-07 |
| 7449689 | Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method | Ryoichi Matsuoka, Takumichi Sutani, Akiyuki Sugiyama, Yasuhiro Yoshitake, Hideaki Sasazawa | 2008-11-11 |
| 7365322 | Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern | Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani | 2008-04-29 |
| 6929892 | Method of monitoring an exposure process | Chie Shishido, Hidetoshi Morokuma, Yuki Ojima, Maki Tanaka | 2005-08-16 |