TH

Torsten Huisinga

Globalfoundries: 19 patents #170 of 4,424Top 4%
Overall (All Time): #239,065 of 4,157,543Top 6%
19
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9685497 Embedded metal-insulator-metal capacitor Robert Seidel 2017-06-20
9478602 Method of forming an embedded metal-insulator-metal (MIM) capacitor Robert Seidel 2016-10-25
9305878 Integrated circuits and methods for fabricating integrated circuits with capping layers between metal contacts and interconnects Carsten Peters, Andreas Ott, Axel Preusse 2016-04-05
9287109 Methods of forming a protection layer to protect a metal hard mask layer during lithography reworking processes Keith Donegan, Robert Seidel 2016-03-15
9257329 Methods for fabricating integrated circuits including densifying interlevel dielectric layers Oliver Mieth, Carsten Peters 2016-02-09
8932911 Integrated circuits and methods for fabricating integrated circuits with capping layers between metal contacts and interconnects Carsten Peters, Andreas Ott, Axel Preusse 2015-01-13
8922023 Semiconductor device comprising metallization layers of reduced interlayer capacitance by reducing the amount of etch stop materials Jens Heinrich, Ralf Richter, Ronny Pfutzner 2014-12-30
8859418 Methods of forming conductive structures using a dual metal hard mask technique Jens Hahn, Kai Frohberg 2014-10-14
8786088 Semiconductor device including ultra low-K (ULK) metallization stacks with reduced chip-package interaction Jens Heinrich, Kai Frohberg, Frank Feustel 2014-07-22
8673770 Methods of forming conductive structures in dielectric layers on an integrated circuit device Jens Heinrich, Ronny Pfuetzner 2014-03-18
8598714 Semiconductor device comprising through hole vias having a stress relaxation mechanism Michael Grillberger, Jens Hahn 2013-12-03
8536050 Selective shrinkage of contact elements in a semiconductor device Kai Frohberg, Ralf Richter, Katrin Reiche 2013-09-17
8492269 Hybrid contact structure with low aspect ratio contacts in a semiconductor device Jens Heinrich, Ralf Richter, Kai Frohberg 2013-07-23
8435841 Enhancement of ultraviolet curing of tensile stress liner using reflective materials Ralf Richter 2013-05-07
8399335 Sophisticated metallization systems in semiconductors formed by removing damaged dielectric layers after forming the metal features Michael Grillberger, Frank Feustel 2013-03-19
8383510 Semiconductor device comprising metallization layers of reduced interlayer capacitance by reducing the amount of etch stop materials Jens Heinrich, Ralf Richter, Ronny Pfuetzner 2013-02-26
8324108 Increasing robustness of a dual stress liner approach in a semiconductor device by applying a wet chemistry Ralf Richter, Markus Lenski 2012-12-04
8216928 Methods for fabricating semiconductor devices having local contacts Ralf Richter, Jens Heinrich 2012-07-10
7985668 Method for forming a metal silicide having a lower potential for containing material defects Ralf Richter, Jens Heinrich 2011-07-26