Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932614 | Method of thinning a semiconductor substrate | Steven R. Codding, Timothy C. Krywanczyk, Edmund J. Sprogis | 2011-04-26 |
| 7867876 | Method of thinning a semiconductor substrate | Steven R. Codding, Timothy C. Krywanczyk, Edmund J. Sprogis | 2011-01-11 |
| 7844099 | Inspection method for protecting image sensor devices with front surface protection | Timothy C. Krywanczyk, Erik M. Probstfield | 2010-11-30 |
| 6582857 | Repair of masks to promote adhesion of patches | Philip Flanigan, Dennis M. Hayden, Michael S. Hibbs | 2003-06-24 |
| 6534225 | Tapered ion implantation with femtosecond laser ablation to remove printable alternating phase shift features | Steven Flanders, Dennis M. Hayden | 2003-03-18 |
| 6515736 | Reticle capturing and handling system | Dennis M. Hayden | 2003-02-04 |
| 6415431 | Repair of phase shift materials to enhance adhesion | — | 2002-07-02 |
| 6346352 | Quartz defect removal utilizing gallium staining and femtosecond ablation | Dennis M. Hayden, John N. Ross | 2002-02-12 |
| 6338409 | Reticle SMIF pod in situ orientation | — | 2002-01-15 |
| 6261723 | Transfer layer repair process for attenuated masks | Merrilou George | 2001-07-17 |
| 6190836 | Methods for repair of photomasks | Brian J. Grenon, Richard A. Haight, Dennis M. Hayden, Michael S. Hibbs, J. Peter Levin +4 more | 2001-02-20 |
| 6165649 | Methods for repair of photomasks | Brian J. Grenon, Richard A. Haight, Dennis M. Hayden, Michael S. Hibbs, J. Peter Levin +4 more | 2000-12-26 |
| 6156461 | Method for repair of photomasks | Brian J. Grenon, Richard A. Haight, Dennis M. Hayden, Michael S. Hibbs, J. Peter Levin +4 more | 2000-12-05 |
| 6110624 | Multiple polarity mask exposure method | Michael S. Hibbs, David S. O'Grady, Denis Rigaill | 2000-08-29 |
| 6090507 | Methods for repair of photomasks | Brian J. Grenon, Richard A. Haight, Dennis M. Hayden, Michael S. Hibbs, J. Peter Levin +4 more | 2000-07-18 |
| 6016357 | Feedback method to repair phase shift masks | Edward W. Conrad, Orest Bula | 2000-01-18 |
| 5981110 | Method for repairing photomasks | Merrilou George | 1999-11-09 |
| 5882823 | Fib repair method | — | 1999-03-16 |
| 5498313 | Symmetrical etching ring with gas control | Michael Edward Bailey, Dinh Dang, James G. Michael, Paul W. Pastel, Sylvia Tousley +1 more | 1996-03-12 |