Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8727708 | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | Tsuyoshi Moriya, Takahiro Murakami, Yoshiyuki Kobayashi, Tetsuji Sato, Eiichi Sugawara +1 more | 2014-05-20 |
| 8124539 | Plasma processing apparatus, focus ring, and susceptor | Noriyuki Iwabuchi, Shigeaki Kato, Tomoya Okubo, Jun Hirose, Koichi Nagakura +2 more | 2012-02-28 |
| 8114247 | Plasma processing apparatus and focus ring | Shinji Himori | 2012-02-14 |
| 7927066 | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | Tsuyoshi Moriya, Takahiro Murakami, Yoshiyuki Kobayashi, Tetsuji Sato, Eiichi Sugawara +1 more | 2011-04-19 |
| 7850174 | Plasma processing apparatus and focus ring | Shinji Himori | 2010-12-14 |
| 7622017 | Processing apparatus and gas discharge suppressing member | Shinji Himori, Kazuya Nagaseki, Tomoya Kubota, Daisuke Hayashi | 2009-11-24 |
| 7604845 | Method for coating internal member having holes in vacuum processing apparatus and the internal member having holes coated by using the coating method | Jun Takeuchi, Masaaki Kishida, Tadakazu Matsunaga | 2009-10-20 |
| 5961361 | Method for manufacturing electrode plate for plasma processing device | Masaaki Mitsuno | 1999-10-05 |