TM

Tadakazu Matsunaga

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,338,372 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7604845 Method for coating internal member having holes in vacuum processing apparatus and the internal member having holes coated by using the coating method Jun Takeuchi, Masaaki Kishida, Shosuke Endoh 2009-10-20