Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159796 | Systems and methods for integrating load locks into a factory interface footprint space | Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Sushant S. Koshti | 2024-12-03 |
| 12142508 | Factory interface robots usable with integrated load locks | Sushant S. Koshti, Paul B. Reuter, David Phillips, Jacob Newman, Andrew J. Constant +6 more | 2024-11-12 |
| 11894251 | Transport system | Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Jeffrey C. Hudgens +2 more | 2024-02-06 |
| 11817332 | Multi-wafer volume single transfer chamber facet | William T. Weaver, Andrew J. Constant, Jacob Newman | 2023-11-14 |
| 11581203 | Systems for integrating load locks into a factory interface footprint space | Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Sushant S. Koshti | 2023-02-14 |
| 11232965 | Transport system | Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Jeffrey C. Hudgens +2 more | 2022-01-25 |
| 11204312 | In-situ full wafer metrology system | Ami Sade, Todd Egan, Jacob Newman | 2021-12-21 |
| 10818525 | Ambient controlled transfer module and process system | Andrew J. Constant, Jacob Newman, Charles T. Carlson, William T. Weaver, Stephen C. Hickerson | 2020-10-27 |
| 10665494 | Automated apparatus to temporarily attach substrates to carriers without adhesives for processing | Niranjan Kumar, Seshadri Ramaswami, Amikam Sade, Andy Constant, Maureen Frances Breiling | 2020-05-26 |
| 10361104 | Ambient controlled transfer module and process system | Andrew J. Constant, Jacob Newman, Charles T. Carlson, William T. Weaver, Stephen C. Hickerson | 2019-07-23 |
| 9959610 | System and method to detect substrate and/or substrate support misalignment using imaging | Leonid M. Tertitski, Schubert S. Chu, Kim Vellore, Zhepeng CONG | 2018-05-01 |
| 8527080 | Method and system for managing process jobs in a semiconductor fabrication facility | Venkatesh Babu, Robert D. Flores, Brendan Hickey, Krishna Kumar Kuttannair, Song J. Park +2 more | 2013-09-03 |