Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11026663 | Ultrasound imaging apparatus and methods | John Fothergill | 2021-06-08 |
| 7438228 | Systems and methods for managing electronic prescriptions | Scott Paul Robertson, Harikrishna Madanaraj, Marappan Ramachandran | 2008-10-21 |
| 6902682 | Method and apparatus for electrostatically maintaining substrate flatness | Quanyuan Shang, Kam S. Law, James T. Gardner | 2005-06-07 |
| 6610374 | Method of annealing large area glass substrates | Chuang-Chuang Tsai, Takako Takehara, Regina Qiu, Yvonne LeGrice, William Harshbarger | 2003-08-26 |
| 6500265 | Apparatus for electrostatically maintaining subtrate flatness | Quanyuan Shang, Kam S. Law, James T. Gardner | 2002-12-31 |
| 6468601 | Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology | Quanyuan Shang, Kam S. Law, Dan Maydan | 2002-10-22 |
| 6444277 | Method for depositing amorphous silicon thin films onto large area glass substrates by chemical vapor deposition at high deposition rates | Kam S. Law, Pamela Lou, Marc M. Kollrack, Angela Lee, Dan Maydan | 2002-09-03 |
| 6355108 | Film deposition using a finger type shadow frame | Tae Kyung Won, Quanyuan Shang, Soo Young Choi, Kam S. Law, Robert I. Greene +1 more | 2002-03-12 |
| 6352910 | Method of depositing amorphous silicon based films having controlled conductivity | William Harshbarger, Takako Takehara, Jeff Olsen, Regina Qiu, Yvonne LeGrice +2 more | 2002-03-05 |
| 6338874 | Method for multilayer CVD processing in a single chamber | Kam S. Law, Pamela Lou, Marc M. Kollrack, Angela Lee, Dan Maydan | 2002-01-15 |
| 6294219 | Method of annealing large area glass substrates | Chuang-Chuang Tsai, Takako Takehara, Regina Qiu, Yvonne LeGrice, William Harshbarger | 2001-09-25 |
| 6177023 | Method and apparatus for electrostatically maintaining substrate flatness | Quanyuan Shang, Kam S. Law, James T. Gardner | 2001-01-23 |
| 6172322 | Annealing an amorphous film using microwave energy | Quanyuan Shang, Kam S. Law, Takako Takehara, Taekyung Won, Sheng Sun | 2001-01-09 |
| 6055927 | Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology | Quanyuan Shang, Kam S. Law, Dan Maydan | 2000-05-02 |
| 6024044 | Dual frequency excitation of plasma for film deposition | Kam S. Law, Quanyuan Shang, Jeff Olsen, Carl A. Sorensen | 2000-02-15 |
| 5902650 | Method of depositing amorphous silicon based films having controlled conductivity | Jeff Feng, Kam S. Law | 1999-05-11 |
| 5861197 | Deposition of high quality conformal silicon oxide thin films on glass substrates | Kam S. Law, Guofu J. Feng | 1999-01-19 |
| 5851602 | Deposition of high quality conformal silicon oxide thin films for the manufacture of thin film transistors | Kam S. Law, Jeffrey Feng | 1998-12-22 |
| 5589233 | Single chamber CVD process for thin film transistors | Kam S. Law, Guofu J. Feng | 1996-12-31 |
| 5567476 | Multi-step chemical vapor deposition method for thin film transistors | Kam S. Law, Michael Kollrack, Angela Lee, Takako Takehara, Guofu J. Feng +1 more | 1996-10-22 |
| 5441768 | Multi-step chemical vapor deposition method for thin film transistors | Kam S. Law, Michael Kollrack, Angela Lee, Takako Takehara, Guofu J. Feng +1 more | 1995-08-15 |
| 5399387 | Plasma CVD of silicon nitride thin films on large area glass substrates at high deposition rates | Kam S. Law, Pamela Lou, Marc M. Kollrack, Angela Lee, Dan Maydan | 1995-03-21 |
| 5380566 | Method of limiting sticking of body to susceptor in a deposition treatment | Marc M. Kollrack, Angela Lee, Kam S. Law, Dan Maydan | 1995-01-10 |
| 5366585 | Method and apparatus for protection of conductive surfaces in a plasma processing reactor | Kam S. Law, John M. White | 1994-11-22 |
| 5359445 | Fiber optic sensor | — | 1994-10-25 |