Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444277 | Method for depositing amorphous silicon thin films onto large area glass substrates by chemical vapor deposition at high deposition rates | Kam S. Law, Robert Robertson, Pamela Lou, Marc M. Kollrack, Dan Maydan | 2002-09-03 |
| 6338874 | Method for multilayer CVD processing in a single chamber | Kam S. Law, Robert Robertson, Pamela Lou, Marc M. Kollrack, Dan Maydan | 2002-01-15 |
| 5567476 | Multi-step chemical vapor deposition method for thin film transistors | Kam S. Law, Robert Robertson, Michael Kollrack, Takako Takehara, Guofu J. Feng +1 more | 1996-10-22 |
| 5441768 | Multi-step chemical vapor deposition method for thin film transistors | Kam S. Law, Robert Robertson, Michael Kollrack, Takako Takehara, Guofu J. Feng +1 more | 1995-08-15 |
| 5399387 | Plasma CVD of silicon nitride thin films on large area glass substrates at high deposition rates | Kam S. Law, Robert Robertson, Pamela Lou, Marc M. Kollrack, Dan Maydan | 1995-03-21 |
| 5380566 | Method of limiting sticking of body to susceptor in a deposition treatment | Robert Robertson, Marc M. Kollrack, Kam S. Law, Dan Maydan | 1995-01-10 |