Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352910 | Method of depositing amorphous silicon based films having controlled conductivity | William Harshbarger, Takako Takehara, Jeff Olsen, Regina Qiu, Yvonne LeGrice +2 more | 2002-03-05 |
| 5976900 | Method of reducing impurity contamination in semiconductor process chambers | Jianmin Qiao | 1999-11-02 |
| 5861197 | Deposition of high quality conformal silicon oxide thin films on glass substrates | Kam S. Law, Robert Robertson | 1999-01-19 |
| 5589233 | Single chamber CVD process for thin film transistors | Kam S. Law, Robert Robertson | 1996-12-31 |
| 5567476 | Multi-step chemical vapor deposition method for thin film transistors | Kam S. Law, Robert Robertson, Michael Kollrack, Angela Lee, Takako Takehara +1 more | 1996-10-22 |
| 5441768 | Multi-step chemical vapor deposition method for thin film transistors | Kam S. Law, Robert Robertson, Michael Kollrack, Angela Lee, Takako Takehara +1 more | 1995-08-15 |