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Parallel fault detection |
Elfido Coss, Jr., Ernest D. Adams, III, Howard E. Castle, Thomas J. Sonderman, Alexander J. Pasadyn |
2013-01-22 |
| 7774670 |
Method and apparatus for dynamically determining tester recipes |
Richard J. Markle, Douglas C. Kimbrough, Eric O. Green |
2010-08-10 |
| 7473566 |
Method and apparatus for controlling a film formation process with multiple objectives |
Matthew A. Purdy |
2009-01-06 |
| 7424392 |
Applying a self-adaptive filter to a drifting process |
Jin Wang, Christopher A. Bode, Si QIN, Alexander J. Pasadyn |
2008-09-09 |
| 7186487 |
Method of controlling exposure processes by monitoring photon levels, and system for accomplishing same |
— |
2007-03-06 |
| 7117062 |
Determining transmission of error effects for improving parametric performance |
Thomas J. Sonderman, Brian K. Cusson, Alexander J. Pasadyn |
2006-10-03 |
| 7100081 |
Method and apparatus for fault classification based on residual vectors |
Matthew A. Purdy, Gregory A. Cherry, Richard J. Markle |
2006-08-29 |
| 7020535 |
Method and apparatus for providing excitation for a process controller |
Christopher A. Bode, J. Broc Stirton |
2006-03-28 |
| 6961636 |
Method and apparatus for dynamically monitoring controller tuning parameters |
Alexander J. Pasadyn, Thomas J. Sonderman |
2005-11-01 |
| 6953697 |
Advanced process control of the manufacture of an oxide-nitride-oxide stack of a memory device, and system for accomplishing same |
Howard E. Castle, Brian K. Cusson, Eric O. Green |
2005-10-11 |
| 6912433 |
Determining a next tool state based on fault detection information |
Michael L. Miller, Alexander J. Pasadyn, Eric O. Green |
2005-06-28 |
| 6912437 |
Method and apparatus for controlling a fabrication process based on a measured electrical characteristic |
Jin Wang |
2005-06-28 |
| 6907369 |
Method and apparatus for modifying design constraints based on observed performance |
Richard J. Markle, Alexander J. Pasadyn |
2005-06-14 |
| 6871114 |
Updating process controller based upon fault detection analysis |
Eric O. Green, Matthew A. Purdy, Elfido Coss, Jr., Christopher A. Bode, Gregory A. Cherry |
2005-03-22 |
| 6842661 |
Process control at an interconnect level |
Eric O. Green |
2005-01-11 |
| 6804619 |
Process control based on tool health data |
Eric O. Green, Jin Wang |
2004-10-12 |
| 6790376 |
Process control based upon weight or mass measurements, and systems for accomplishing same |
Richard J. Markle |
2004-09-14 |
| 6554969 |
Acoustically enhanced deposition processes, and systems for performing same |
— |
2003-04-29 |
