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Optical metrology utilizing short-wave infrared wavelengths |
Amnon Manassen, Isaac Salib, Diana Shaphirov, Eitan Hajaj, Vladimir Levinski +7 more |
2024-10-08 |
| 12055859 |
Overlay mark design for electron beam overlay |
Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj +4 more |
2024-08-06 |
| 11862524 |
Overlay mark design for electron beam overlay |
Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj +4 more |
2024-01-02 |
| 11720031 |
Overlay design for electron beam and scatterometry overlay measurements |
Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj +4 more |
2023-08-08 |
| 11703767 |
Overlay mark design for electron beam overlay |
Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feier, Eitan Hajaj +4 more |
2023-07-18 |
| 11532566 |
Misregistration target having device-scaled features useful in measuring misregistration of semiconductor devices |
Roie Volkovich, Liran Yerushalmi, Mark Ghinovker |
2022-12-20 |
| 11355375 |
Device-like overlay metrology targets displaying Moiré effects |
Roie Volkovich, Liran Yerushalmi, Mark Ghinovker |
2022-06-07 |
| 11353493 |
Data-driven misregistration parameter configuration and measurement system and method |
Shlomit Katz, Roie Volkovich, Anna Golotsvan |
2022-06-07 |
| 11067904 |
System for combined imaging and scatterometry metrology |
Eran Amit |
2021-07-20 |
| 10527951 |
Compound imaging metrology targets |
Eran Amit, Mark Ghinovker, Tal Itzkovich, Nuriel Amir |
2020-01-07 |
| 10401841 |
Identifying registration errors of DSA lines |
Roie Volkovich, Eran Amit |
2019-09-03 |
| 10303835 |
Method and apparatus for direct self assembly in target design and production |
Eran Amit, Tal Itzkovich, Nuriel Amir, Roie Volkovich, DongSub Choi |
2019-05-28 |
| 10274837 |
Metrology target for combined imaging and scatterometry metrology |
Eran Amit |
2019-04-30 |
| 10002806 |
Metrology targets with filling elements that reduce inaccuracies and maintain contrast |
Nuriel Amir |
2018-06-19 |