Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12344955 | Electroplating co-planarity improvement by die shielding | Charles Sharbono, Paul R. McHugh, Gregory J. Wilson, John L. Klocke | 2025-07-01 |
| 11982008 | Electroplating system | Paul R. McHugh, Gregory J. Wilson, Kyle M. Hanson, John L. Klocke, Paul Van Valkenburg +5 more | 2024-05-14 |
| 11814744 | Substrate cleaning components and methods in a plating system | Gregory J. Wilson, Andrew Anten, Richard W. Plavidal, Eric J. Bergman, Tricia Youngbull +2 more | 2023-11-14 |
| 11795566 | Paddle chamber with anti-splashing baffles | — | 2023-10-24 |
| 11697887 | Multi-compartment electrochemical replenishment cell | Charles Sharbono, Gregory J. Wilson, Paul R. McHugh, Paul Van Valkenburg, Deepak Saagar Kalaikadal +1 more | 2023-07-11 |
| 11578422 | Electroplating system | Paul R. McHugh, Gregory J. Wilson, Kyle M. Hanson, John L. Klocke, Paul Van Valkenburg +5 more | 2023-02-14 |
| 11268208 | Electroplating system | Paul R. McHugh, Gregory J. Wilson, Kyle M. Hanson, John L. Klocke, Paul Van Valkenburg +5 more | 2022-03-08 |
| 10087543 | Seal rings in electrochemical processors | George Mattinger, Gregory J. Wilson, Eric A. Englhardt, Balamurugan Ramasamy | 2018-10-02 |
| 8500968 | Deplating contacts in an electrochemical plating apparatus | Daniel J. Woodruff, John L. Klocke, Klaus H. Pfeifer, Kyle M. Hanson, Matthew Herset | 2013-08-06 |
| 7811422 | Electro-chemical processor with wafer retainer | — | 2010-10-12 |
| 7393439 | Integrated microfeature workpiece processing tools with registration systems for paddle reactors | Paul R. McHugh, Gregory J. Wilson, Daniel J. Woodruff, James J. Erickson | 2008-07-01 |
| 7390383 | Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces | Paul R. McHugh, Gregory J. Wilson, Daniel J. Woodruff, James J. Erickson | 2008-06-24 |
| 7390382 | Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods | Paul R. McHugh, Gregory J. Wilson, Daniel J. Woodruff, James J. Erickson | 2008-06-24 |
| 7294243 | Contact assemblies for electrochemical processing of microelectronic workpieces and method of making thereof | Gregory J. Wilson, Steve Eudy | 2007-11-13 |
| 7252714 | Apparatus and method for thermally controlled processing of microelectronic workpieces | Kyle M. Hanson, Robert W. Batz, Jr., Rajesh Baskaran, Zhongmin Hu, Gregory J. Wilson +1 more | 2007-08-07 |