| 12363948 |
Formation of gate all around device |
Myungsun Kim, Andy Lo, Eric Davey, Benjamin Colombeau |
2025-07-15 |
| 12334337 |
Integrated flowable low-k gap-fill and plasma treatment |
Myungsun Kim, Jingmei Liang, Martin Jay Seamons, Benjamin Colombeau |
2025-06-17 |
| 12243941 |
Conformal oxidation for gate all around nanosheet I/O device |
Myungsun Kim, Benjamin Colombeau, Andy Lo |
2025-03-04 |
| 12062708 |
Selective silicon etch for gate all around transistors |
Myungsun Kim, Benjamin Colombeau, Sanjay Natarajan |
2024-08-13 |
| 11948885 |
Methods and apparatus for forming dual metal interconnects |
Suketu Arun Parikh, Rong Tao, Roey Shaviv, Joung Joo Lee, Seshadri Ganguli +3 more |
2024-04-02 |
| 11508828 |
Selective silicon etch for gate all around transistors |
Myungsun Kim, Benjamin Colombeau, Sanjay Natarajan |
2022-11-22 |
| 11495461 |
Film stack for lithography applications |
Tejinder Singh, Suketu Arun Parikh, Daniel Lee Diehl, Jothilingam Ramalingam, Yong Cao +3 more |
2022-11-08 |
| 11075165 |
Methods and apparatus for forming dual metal interconnects |
Suketu Arun Parikh, Rong Tao, Roey Shaviv, Joung Joo Lee, Seshadri Ganguli +3 more |
2021-07-27 |
