Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9263078 | Patterning of magnetic thin film using energized ions | Steven Verhaverbeke, Omkaram Nalamasu, Majeed A. Foad, Nety M. Krishna | 2016-02-16 |
| 8551578 | Patterning of magnetic thin film using energized ions and thermal excitation | Omkaram Nalamasu, Steven Verhaverbeke, Majeed A. Foad, Nety M. Krishna | 2013-10-08 |
| 8535766 | Patterning of magnetic thin film using energized ions | Steven Verhaverbeke, Omkaram Nalamasu, Majeed A. Foad, Nety M. Krishna | 2013-09-17 |
| 6500734 | Gas inlets for wafer processing chamber | Roger N. Anderson, Peter Hey, David K. Carlson, Norma Riley | 2002-12-31 |
| 6402850 | Depositing polysilicon films having improved uniformity and apparatus therefor | Israel Beinglass, Christian M. Gronet | 2002-06-11 |
| 6284650 | Integrated tungsten-silicide processes | Cory Czarnik, Vedapuram S. Achutharaman, Klaus-Dieter Rinnen | 2001-09-04 |
| 6146464 | Susceptor for deposition apparatus | Israel Beinglass, Roger N. Anderson | 2000-11-14 |
| 6113703 | Method and apparatus for processing the upper and lower faces of a wafer | Roger N. Anderson, Seiji Arima, Kunio Kurihara | 2000-09-05 |
| 5932286 | Deposition of silicon nitride thin films | Israel Beinglass | 1999-08-03 |
| 5916369 | Gas inlets for wafer processing chamber | Roger N. Anderson, Peter Hey, David K. Carlson, Norma Riley | 1999-06-29 |
| 5863598 | Method of forming doped silicon in high aspect ratio openings | Shulin Wang, Vedapuram S. Achutharaman | 1999-01-26 |
| 5834059 | Process of depositing a layer of material on a wafer with susceptor back coating | Roger N. Anderson, H. Peter W. Hey, Israel Beinglass | 1998-11-10 |
| 5725673 | Semiconductor wafer process chamber with susceptor back coating | Roger N. Anderson, H. Peter W. Hey, Israel Beinglass | 1998-03-10 |
| 5695819 | Method of enhancing step coverage of polysilicon deposits | Israel Beinglass | 1997-12-09 |
| 5645646 | Susceptor for deposition apparatus | Israel Beinglass, Roger N. Anderson | 1997-07-08 |
| 5599397 | Semiconductor wafer process chamber with suspector back coating | Roger N. Anderson, H. Peter W. Hey, Israel Beinglass | 1997-02-04 |
| 5576059 | Depositing polysilicon films having improved uniformity and apparatus therefor | Israel Beinglass, Christian M. Gronet | 1996-11-19 |
| 5551982 | Semiconductor wafer process chamber with susceptor back coating | Roger N. Anderson, H. Peter W. Hey, Israel Beinglass | 1996-09-03 |
| 5112764 | Method for the fabrication of low leakage polysilicon thin film transistors | Udayanath Mitra | 1992-05-12 |