| 8699001 |
Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method |
Yasuo Aoki, Tomohide Hamada, Hiroshi Shirasu |
2014-04-15 |
| 7864293 |
Exposure apparatus, exposure method, and producing method of microdevice |
Masaki Kato, Kenji Shimizu, Tomoyuki Watanabe |
2011-01-04 |
| 6873400 |
Scanning exposure method and system |
Masaichi Murakami, Masaki Kato, Katsuya Machino |
2005-03-29 |
| 6538724 |
Exposure apparatus |
Nobutaka Fujimori |
2003-03-25 |
| 6506544 |
Exposure method and exposure apparatus and mask |
Kazuhiko Hori, Katsuya Machino, Masahiro Iguchi |
2003-01-14 |
| 6204912 |
Exposure method, exposure apparatus, and mask |
Makoto Tsuchiya, Kei Nara, Nobutaka Fujimori, Masami Seki |
2001-03-20 |
| 5912726 |
Projection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination system |
Kei Nara, Masaichi Murakami, Nobutaka Fujimori, Toshio Matsuura |
1999-06-15 |
| 5859690 |
Method of dividing and exposing patterns |
— |
1999-01-12 |
| 5532822 |
Method of measuring orthogonality of stage unit |
Tadaaki Shinozaki, Kunihiro Kawae, Kazuo Murano |
1996-07-02 |