Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6873400 | Scanning exposure method and system | Masaichi Murakami, Masaki Kato, Manabu Toguchi | 2005-03-29 |
| 6506544 | Exposure method and exposure apparatus and mask | Kazuhiko Hori, Manabu Toguchi, Masahiro Iguchi | 2003-01-14 |
| 5716458 | Method of washing and drying an article | — | 1998-02-10 |