Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7095037 | Electron beam lithography system having improved electron gun | Andres Fernadez, Jeffrey S. Sullivan, Paul C. Allen | 2006-08-22 |
| 7009177 | Apparatus and method for tilted particle-beam illumination | Luca Grella, David L. Adler | 2006-03-07 |
| 6943360 | Twisted-compensated low-energy electron microscope | — | 2005-09-13 |
| 6936816 | High contrast inspection and review of magnetic media and heads | David Aitan Soltz, Harald F. Hess | 2005-08-30 |
| 6930309 | Dual-energy electron flooding for neutralization of charged substrate | Donald J. Parker | 2005-08-16 |
| 6903338 | Method and apparatus for reducing substrate edge effects in electron lenses | David L. Adler | 2005-06-07 |
| 6878937 | Prism array for electron beam inspection and defect review | — | 2005-04-12 |
| 6870172 | Maskless reflection electron beam projection lithography | Harald F. Hess, David L. Adler, Kirk J. Bertsche | 2005-03-22 |
| 6858843 | Immersion objective lens for e-beam inspection | David L. Adler | 2005-02-22 |
| 6812461 | Photocathode source for e-beam inspection or review | David L. Adler | 2004-11-02 |
| 6803571 | Method and apparatus for dual-energy e-beam inspector | David L. Adler | 2004-10-12 |
| 6759654 | High contrast inspection and review of magnetic media and heads | David Aitan Soltz, Harald F. Hess | 2004-07-06 |
| 6759800 | Diamond supported photocathodes for electron sources | Andres Fernandez, Timothy N. Thomas, Xiaolan Chen, Steven Thomas Coyle, Ming Lun Yu | 2004-07-06 |
| 6724002 | Multiple electron beam lithography system with multiple beam modulated laser illumination | Steven Thomas Coyle, Andres Fernandez, Allan L. Sagle, Paul C. Allen, Xiaolan Chen +5 more | 2004-04-20 |
| 6555830 | Suppression of emission noise for microcolumn applications in electron beam inspection | Tai-Hon Philip Chang, Kim Y. Lee, Ming Lun Yu | 2003-04-29 |
| 6538256 | Electron beam lithography system using a photocathode with a pattern of apertures for creating a transmission resonance | Vidhya Krishnamurthi, Kim Y. Lee | 2003-03-25 |
| 6476401 | Moving photocathode with continuous regeneration for image conversion in electron beam lithography | Lee H. Veneklasen, Bart Scholte van Mast | 2002-11-05 |
| 6429443 | Multiple beam electron beam lithography system | Steven Thomas Coyle, Andres Fernandez, Tai-Hon Philip Chang | 2002-08-06 |
| 6399934 | Optical coupling to gated photocathodes | Jeffrey S. Sullivan, Steven Thomas Coyle, Andres Fernandez | 2002-06-04 |
| 6376984 | Patterned heat conducting photocathode for electron beam source | Andres Fernandez, Tai-Hon Philip Chang, Kim Y. Lee, Steven Thomas Coyle | 2002-04-23 |
| 6376985 | Gated photocathode for controlled single and multiple electron beam emission | Kim Y. Lee, Tai-Hon Philip Chang, C. Neil Berglund | 2002-04-23 |
| 6288401 | Electrostatic alignment of a charged particle beam | Tai-Hon Philip Chang, Lawrence P. Muray, Ho Seob Kim, Kim Y. Lee | 2001-09-11 |
| 6220914 | Method of forming gated photocathode for controlled single and multiple electron beam emission | Kim Y. Lee, Tai-Hon Philip Chang, C. Neil Berglund | 2001-04-24 |
| 6215128 | Compact photoemission source, field and objective lens arrangement for high throughput electron beam lithography | Lee H. Veneklasen | 2001-04-10 |
| 6157039 | Charged particle beam illumination of blanking aperture array | — | 2000-12-05 |