Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422752 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Akihiro Kaneko, Minoru Uemura, Akiyoshi GOTO, Michihiro SHIRAKAWA | 2025-09-23 |
| 12216404 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Minoru Uemura, Takashi Kawashima, Akiyoshi GOTO, Kei Yamamoto, Kazuhiro Marumo +1 more | 2025-02-04 |
| 12032288 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Minoru Uemura, Akihiro Kaneko, Akiyoshi GOTO, Kei Yamamoto | 2024-07-09 |
| 12007688 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, method for manufacturing electronic device, and resin | Daisuke ASAKAWA, Akiyoshi GOTO, Takashi Kawashima, Yasufumi Oishi, Keita Kato | 2024-06-11 |
| 11886113 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Keita Kato, Michihiro SHIRAKAWA, Akiyoshi GOTO, Takashi Kawashima | 2024-01-30 |
| 11073762 | Actinic ray-sensitive or radiation sensitive resin composition, actinic raysensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, and photoacid generator | Daisuke ASAKAWA, Akiyoshi GOTO, Keita Kato, Keiyu OU, Kyohei Sakita | 2021-07-27 |
| 11067890 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Akira Takada, Keita Kato, Kyohei Sakita | 2021-07-20 |
| 10802399 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Ryo Nishio, Akiyoshi GOTO, Tomotaka Tsuchimura, Michihiro SHIRAKAWA, Keita Kato | 2020-10-13 |
| 10303058 | Pattern forming method, treating agent, electronic device, and method for manufacturing the same | Hajime Furutani, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2019-05-28 |
| 10234759 | Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film and method of forming pattern | Takeshi Kawabata, Hiroo Takizawa, Akinori Shibuya, Akiyoshi GOTO, Keita Kato | 2019-03-19 |
| 10025186 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Keita Kato, Keiyu OU, Michihiro SHIRAKAWA | 2018-07-17 |
| 10018913 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Michihiro SHIRAKAWA, Keita Kato | 2018-07-10 |
| 9996003 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Michihiro SHIRAKAWA, Keita Kato | 2018-06-12 |
| 9952509 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, method for manufacturing electronic device, and electronic device | Keita Kato, Keiyu OU, Michihiro SHIRAKAWA, Akiyoshi GOTO | 2018-04-24 |
| 9841679 | Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device | Akiyoshi GOTO, Akinori Shibuya, Keita Kato, Kei Yamamoto | 2017-12-12 |
| 9791777 | Active light sensitive or radiation sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device | Akiyoshi GOTO, Michihiro SHIRAKAWA, Keita Kato, Keiyu OU | 2017-10-17 |