Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7777197 | Vacuum reaction chamber with x-lamp heater | Amir Al-Bayati, Alexandros T. Demos, Dale R. DuBois, Khaled A. Elsheref, Naoyuki Iwasaki +4 more | 2010-08-17 |
| 7611996 | Multi-stage curing of low K nano-porous films | Francimar Schmitt, Yi Zheng, Kang Sub Yim, Sang-Hoon Ahn, Dustin W. Ho +4 more | 2009-11-03 |
| 7547643 | Techniques promoting adhesion of porous low K film to underlying barrier layer | Francimar Schmitt, Alexandros T. Demos, Derek R. Witty, Hichem M'Sadd, Sang-Hoon Ahn +2 more | 2009-06-16 |
| 6664202 | Mixed frequency high temperature nitride CVD process | Sum-Yee Betty Tang, May Wang | 2003-12-16 |