Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7803646 | Method for producing a component having a semiconductor substrate and component | Frank Fischer, Thorsten Pannek | 2010-09-28 |
| 7495302 | Micromechanical component having a diaphragm | Frank Fischer, Hans Artmann, Arnim Hoechst, Julian Gonska | 2009-02-24 |
| 7321156 | Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device | Frank Fischer, Hans-Peter Trah, Franz Laermer | 2008-01-22 |
| 7261825 | Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device | Frank Fischer | 2007-08-28 |
| 7148077 | Micromechanical structural element having a diaphragm and method for producing such a structural element | Matthias Fuertsch, Stefan Pinter, Heribert Weber, Frank Fischer, Christoph Schelling +1 more | 2006-12-12 |
| 7060197 | Micromechanical mass flow sensor and method for the production thereof | Matthias Fuertsch, Frank Fischer, Frieder Sundermeier | 2006-06-13 |
| 6905615 | Method of manufacturing a micromechanical component | Frank Fischer, Wilhelm Frey, Udo Bischof | 2005-06-14 |
| 6867061 | Method for producing surface micromechanical structures, and sensor | Frank Fischer, Wilhelm Frey | 2005-03-15 |
| 6686638 | Micromechanical component including function components suspended movably above a substrate | Frank Fischer | 2004-02-03 |