| 10446404 |
Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus |
Ryo Tajima, Masahiro Hatakeyama, Kiwamu Tsukamoto, Kenji Watanabe, Shoji Yoshikawa +2 more |
2019-10-15 |
| 10074510 |
Inspection system and inspection image data generation method |
Shoji Yoshikawa |
2018-09-11 |
| 10002740 |
Inspection device |
Masahiro Hatakeyama, Ryo Tajima, Kenji Watanabe, Yasushi Toma, Kenji Terao +1 more |
2018-06-19 |
| 9852878 |
Surface processing apparatus |
Masahiro Hatakeyama, Ryo Tajima, Kiwamu Tsukamoto, Kenji Terao, Shoji Yoshikawa |
2017-12-26 |
| 9760984 |
Control unit for generating timing signal for imaging unit in inspection system and method for sending out timing signal to imaging unit |
— |
2017-09-12 |
| 9406480 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2016-08-02 |
| 9105445 |
Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded |
Ryo Tajima, Shoji Yoshikawa |
2015-08-11 |
| 8946631 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2015-02-03 |
| 8796621 |
Detector and inspecting apparatus |
Masahiro Hatakeyama, Shoji Yoshikawa, Tsutomu Karimata, Nobuharu Noji |
2014-08-05 |
| 8742341 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2014-06-03 |
| 8431892 |
Detector and inspecting apparatus |
Masahiro Hatakeyama, Shoji Yoshikawa, Tsutomu Karimata, Nobuharu Noji |
2013-04-30 |
| 7928382 |
Detector and inspecting apparatus |
Masahiro Hatakeyama, Shoji Yoshikawa, Tsutomu Karimata, Nobuharu Noji |
2011-04-19 |
| 7741601 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2010-06-22 |
| 7425703 |
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method |
Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Takeshi Murakami, Kenji Watanabe +1 more |
2008-09-16 |
| 7365324 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2008-04-29 |
| 7138629 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2006-11-21 |