Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339595 | Measurement apparatus, lithography apparatus, and article manufacturing method | Satoru Jimbo | 2025-06-24 |
| 12307643 | Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatus | Satoru Jimbo, Yoshio Suzaki, Noburu Takakura | 2025-05-20 |
| 9718234 | Imprint lithography apparatus and device manufacturing method therefor | Hironori Maeda, Seiya Miura, Ken Minoda | 2017-08-01 |
| 9645514 | Imprint apparatus, imprint method, and device manufacturing method | Hironori Maeda, Seiya Miura, Ken Minoda | 2017-05-09 |
| 9606456 | Lithography apparatus, determination method, and method of manufacturing article | Masahiro Ogura, Kazushi Mizumoto | 2017-03-28 |
| 9595447 | Detection apparatus, imprint apparatus, and method of manufacturing products | Hiroshi Inada, Takafumi Miyaharu | 2017-03-14 |
| 9594315 | Detection apparatus, lithography apparatus and method of manufacturing article | Takafumi Miyaharu | 2017-03-14 |
| 9400434 | Exposure apparatus, exposure method, and device manufacturing method | Tsutomu Takenaka | 2016-07-26 |
| 9283720 | Position detection apparatus, imprint apparatus, and position detection method | Ken Minoda, Yoshihiro Shiode, Hironori Maeda | 2016-03-15 |
| 9261802 | Lithography apparatus, alignment method, and method of manufacturing article | Shinichiro Koga | 2016-02-16 |
| 9188855 | Imprint apparatus, imprint method, and device manufacturing method | Hironori Maeda, Seiya Miura, Ken Minoda | 2015-11-17 |
| 8922786 | Detector, imprint apparatus, and article manufacturing method | Toshiki Iwai, Hironori Maeda, Ken Minoda | 2014-12-30 |
| 8842294 | Position detection apparatus, imprint apparatus, and position detection method | Ken Minoda, Yoshihiro Shiode, Hironori Maeda | 2014-09-23 |
| 8659743 | Detection apparatus, exposure apparatus, and device fabrication method | — | 2014-02-25 |
| 7986396 | Exposure apparatus | — | 2011-07-26 |
| 7551281 | Position sensor | Hiroshi Sato | 2009-06-23 |
| 7450249 | Position sensor | Hiroshi Sato | 2008-11-11 |
| 7298500 | Position sensor | Hiroshi Sato | 2007-11-20 |
| 7230706 | Position detection method and apparatus, and exposure method and apparatus | — | 2007-06-12 |
| 7142284 | Position detector, position detecting method, and exposure apparatus having the same | — | 2006-11-28 |
| 7019836 | Position detection method and apparatus, and exposure method and apparatus | — | 2006-03-28 |
| 6930016 | Position detection apparatus and method, exposure apparatus, and device manufacturing method | Hiroshi Tanaka | 2005-08-16 |
| 6870623 | Position detection apparatus, alignment apparatus and methods therefor, and exposure apparatus and device manufacturing method | Hiroshi Tanaka | 2005-03-22 |
| 6707533 | Detection apparatus and exposure apparatus using the same | — | 2004-03-16 |
| 6335784 | Scan type projection exposure apparatus and device manufacturing method using the same | — | 2002-01-01 |