Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871718 | Exposure apparatus, method for controlling the same and article manufacturing method | Akihisa Kaga | 2020-12-22 |
| 10353299 | Lithography method, determination method, information processing apparatus, storage medium, and method of manufacturing article | — | 2019-07-16 |
| 10036967 | Lithography apparatus, lithography method, and article manufacturing method | — | 2018-07-31 |
| 9606456 | Lithography apparatus, determination method, and method of manufacturing article | Masahiro Ogura, Kazuhiko Mishima | 2017-03-28 |
| 9557659 | Lithography apparatus, determination method, and method of manufacturing article | — | 2017-01-31 |