Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871718 | Exposure apparatus, method for controlling the same and article manufacturing method | Kazushi Mizumoto | 2020-12-22 |
| 8223316 | Exposure apparatus and device manufacturing method | Ryo Kasai | 2012-07-17 |