Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646275 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 2003-11-11 |
| 6486479 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 2002-11-26 |
| 6118129 | Method and system for exposing an exposure pattern on an object by a charged particle beam which is shaped into a plurality of beam elements | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 2000-09-12 |
| 6064807 | Charged-particle beam exposure system and method | Soichiro Arai, Hiroshi Yasuda, Shunsuke Hueki, Yoshihisa Oae | 2000-05-16 |
| 6057907 | Method of and system for exposing pattern on object by charged particle beam | Takamasa Satoh, Soichiro Arai, Kenichi Miyazawa, Yoshihisa Ooaeh, Hiroshi Yasuda | 2000-05-02 |
| 5977548 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 1999-11-02 |
| 5965895 | Method of providing changed particle beam exposure in which representative aligning marks on an object are detected to calculate an actual position to perform exposure | Takamasa Satoh, Hiroshi Yasuda, Yoshihisa Oae, Hisayasu Nishino, Kiichi Sakamoto +8 more | 1999-10-12 |
| 5920077 | Charged particle beam exposure system | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 1999-07-06 |
| 5866300 | Method of and system for exposing pattern on object by charged particle beam | Takamasa Satoh, Soichiro Arai, Kenichi Miyazawa, Yoshihisa Ooaeh, Hiroshi Yasuda | 1999-02-02 |
| 5841145 | Method of and system for exposing pattern on object by charged particle beam | Takamasa Satoh, Yoshihisa Oae, Soichiro Arai, Kenichi Miyazawa, Hiroshi Yasuda +5 more | 1998-11-24 |
| 5721432 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Yoshihisa Oae, Hisayasu Nishino, Kiichi Sakamoto +8 more | 1998-02-24 |
| 5719402 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Yoshihisa Oae, Hisayasu Nishino, Kiichi Sakamoto +8 more | 1998-02-17 |
| 5631113 | Electron-beam exposure system for reduced distortion of electron beam spot | Takamasa Satoh, Hiroshi Yasuda, Akio Yamada, Yoshihisa Oae, Keiji Yamada +1 more | 1997-05-20 |
| 5614725 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 1997-03-25 |
| 5610406 | Charged particle beam exposure method and apparatus | Mitsuhiro Nakano | 1997-03-11 |
| 5546319 | Method of and system for charged particle beam exposure | Takamasa Satoh, Hiroshi Yasuda, Yoshihisa Oae, Hisayasu Nishino, Kiichi Sakamoto +8 more | 1996-08-13 |
| 5528048 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda +4 more | 1996-06-18 |
| 5444257 | Electron-beam exposure system for reduced distortion of electron beam spot | Takamasa Satoh, Hiroshi Yasuda, Akio Yamada, Yoshihisa Oae, Keiji Yamada +1 more | 1995-08-22 |
| 5434795 | Method of forming pattern having optical angle in charged particle exposure system | Hiroshi Yasuda, Kazutaka Taki, Kenichi Miyazawa | 1995-07-18 |
| 5399872 | Charged-particle beam exposure method | Hiroshi Yasuda, Hisayasu Nishino, Soichiro Arai, Yoshihisa Oae | 1995-03-21 |
| 5369282 | Electron beam exposure method and system for exposing a pattern on a substrate with an improved accuracy and throughput | Soichiro Arai, Hiroshi Yasuda, Yoshihisa Oae | 1994-11-29 |
| 5334846 | Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark | Mitsuhiro Nakano | 1994-08-02 |
| 5329130 | Charged particle beam exposure method and apparatus | Hiroshi Yasuda, Kazutaka Taki, Mitsuhiro Nakano | 1994-07-12 |
| 5260579 | Charged particle beam exposure system and charged particle beam exposure method | Hiroshi Yasuda, Yasushi Takahashi, Kiichi Sakamoto, Akio Yamada, Yoshihisa Oae +2 more | 1993-11-09 |
| 5225684 | Charged particle beam exposure apparatus control system and a method of operation for providing a drawing start signal | Kazutaka Taki, Hiroshi Yasuda, Atsushi Saito, Kiichi Sakamoto | 1993-07-06 |