Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164093 | Reflective compact lens for magneto-optic Kerr effect metrology system | Alex Zheng, Jun Wang, David Y. Wang, Chunxia Li, Changfei Yan +7 more | 2024-12-10 |
| 11249110 | Resistivity probes with curved portions | Walter H. Johnson, Nanchang Zhu, Xianghua Liu, Jianli Cui, Zhu Shi +4 more | 2022-02-15 |
| 11043239 | Magneto-optic Kerr effect metrology systems | Jun Wang, Yaolei Zheng, Chunxia Li, Changfei Yan, Lansheng Dong +7 more | 2021-06-22 |
| 10514391 | Resistivity probe having movable needle bodies | Walter H. Johnson, Nanchang Zhu, Xianghua Liu, Jianli Cui, Zhu Shi +4 more | 2019-12-24 |
| 9435826 | Variable spacing four-point probe pin device and method | Walter H. Johnson, Lansheng Dong, Haijing Peng, Xianghua Liu, Jiazhou Jin +2 more | 2016-09-06 |
| 8804106 | System and method for nondestructively measuring concentration and thickness of doped semiconductor layers | Nanchang Zhu, Derrick Shaughnessy, Houssam Chouaib, Yaolei Zheng, Lu Yu +2 more | 2014-08-12 |
| 8004290 | Method and apparatus for determining dielectric layer properties | Xiafang Zhang, Nanchang Zhu, Yiping Feng, Min Xiang | 2011-08-23 |
| 7893703 | Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer | Jeffrey Rzepiela, Yiping Feng, Shiyou Pei, Alexander Kagan, Sergio Edelstein | 2011-02-22 |
| 7719294 | Systems configured to perform a non-contact method for determining a property of a specimen | Amin Samsavar, John M. Schmidt, Rainer Schierle, Gregory S. Horner, Thomas G. Miller +3 more | 2010-05-18 |
| 7538333 | Contactless charge measurement of product wafers and control of corona generation and deposition | Amin Samsavar, John M. Schmidt, Rainer Schierle, Gregory S. Horner, Thomas G. Miller +3 more | 2009-05-26 |
| 7525304 | Measurement of effective capacitance | Yiping Feng, Xiafang Zhang | 2009-04-28 |
| 7397254 | Methods for imperfect insulating film electrical thickness/capacitance measurement | Xiafang Zhang, Zhiwei Xu, Quoc Vu, Thomas G. Miller, Gregory S. Horner | 2008-07-08 |
| 7345306 | Corona based charge voltage measurement | Sergio Edelstein, Eric Bouche, Shiyou Pei, Xiafang Zhang | 2008-03-18 |
| 7248062 | Contactless charge measurement of product wafers and control of corona generation and deposition | Amin Samsavar, John M. Schmidt, Rainer Schierle, Gregory S. Horner, Thomas G. Miller +3 more | 2007-07-24 |
| 7187186 | Methods and systems for determining one or more properties of a specimen | Jeffrey Rzepiela, Shiyou Pei, Zhiwei Xu, John Alexander | 2007-03-06 |
| 7110238 | Systems and methods for using non-contact voltage sensors and corona discharge guns | Zhiwei Xu, Shiyou Pei, Mahmood Mirzaaghaeian, Jeffrey Rzepiela | 2006-09-19 |
| 7103484 | Non-contact methods for measuring electrical thickness and determining nitrogen content of insulating films | Steve Cui, Shiyou Pei, Zhiwei Xu, Haiyong Wang | 2006-09-05 |
| 7098050 | Corona based charge voltage measurement | Sergio Edelstein, Eric Bouche, Shiyou Pei, Xiafang Zhang | 2006-08-29 |
| 7075318 | Methods for imperfect insulating film electrical thickness/capacitance measurement | Xiafang Zhang, Zhiwei Xu, Bao Vu, Thomas G. Miller, Gregory S. Horner | 2006-07-11 |
| 7064565 | Methods and systems for determining an electrical property of an insulating film | Zhiwei Xu, Thomas G. Miller, Gregory S. Horner | 2006-06-20 |
| 6909291 | Systems and methods for using non-contact voltage sensors and corona discharge guns | Zhiwei Xu, Shiyou Pei, Mahmood Mirzaaghaeian, Jeffrey Rzepiela | 2005-06-21 |
| 6284050 | UV exposure for improving properties and adhesion of dielectric polymer films formed by chemical vapor deposition | James Mitchener | 2001-09-04 |
| 6265320 | Method of minimizing reactive ion etch damage of organic insulating layers in semiconductor fabrication | Thomas W. Mountsier, Mary Anne Plano, Joseph R. Laia, Jr. | 2001-07-24 |
| 5961851 | Microwave plasma discharge device | Mohammad Kamarehi, Richard E. Pingree, Jr., Gerald M. Cox | 1999-10-05 |
| 5791782 | Contact temperature probe with unrestrained orientation | David R. Wooten, Jr., Bruce Krein | 1998-08-11 |