Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8304344 | High throughput chemical mechanical polishing composition for metal film planarization | Karl E. Boggs, Michael S. Darsillo, Peter Wrschka | 2012-11-06 |
| 8241704 | Chemical vapor deposition of high conductivity, adherent thin films of ruthenium | Bryan C. Hendrix, Steven M. Bilodeau, Jeffrey F. Roeder, Chongying Xu, Thomas H. Baum | 2012-08-14 |
| 8109130 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Frank Dimeo, Jr., Philip S. H. Chen, Jeffrey W. Neuner, Michele Stawasz, Thomas H. Baum +3 more | 2012-02-07 |
| 8034407 | Chemical vapor deposition of high conductivity, adherent thin films of ruthenium | Bryan C. Hendrix, Steven M. Bilodeau, Jeffrey F. Roeder, Chongying Xu, Thomas H. Baum | 2011-10-11 |
| 7475588 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Frank Dimeo, Jr., Philip S. H. Chen, Jeffrey W. Neuner, Michele Stawacz, Thomas H. Baum +3 more | 2009-01-13 |
| 7370511 | Gas sensor with attenuated drift characteristic | Ing-Shin Chen, Frank Dimeo, Jr., Philip S. H. Chen, Jeffrey W. Neuner, Bryan C. Hendrix | 2008-05-13 |
| 7296458 | Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same | Frank Dimeo, Jr., Philip S. H. Chen, Ing-Shin Chen, Jeffrey W. Neuner | 2007-11-20 |
| 7296460 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Frank Dimeo, Jr., Philip S. H. Chen, Jeffrey W. Neuner, Michele Stawasz, Thomas H. Baum +3 more | 2007-11-20 |
| 7285308 | Chemical vapor deposition of high conductivity, adherent thin films of ruthenium | Bryan C. Hendrix, Steven M. Bilodeau, Jeffrey F. Roeder, Chongying Xu, Thomas H. Baum | 2007-10-23 |
| 7228724 | Apparatus and process for sensing target gas species in semiconductor processing systems | Philip S. H. Chen, Ing-Shin Chen, Frank Dimeo, Jr., Jeffrey W. Neuner, Jeffrey F. Roeder | 2007-06-12 |
| 7080545 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Frank Dimeo, Jr., Philip S. H. Chen, Jeffrey W. Neuner, Michele Stawasz, Thomas H. Baum +3 more | 2006-07-25 |