Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8105457 | Method for joining at least a first member and a second member, lithographic apparatus and device manufacturing method, as well as a device manufactured thereby | — | 2012-01-31 |
| 7630060 | Device manufacturing method, lithographic apparatus and device manufactured thereby | Joost Jeroen Ottens, Levinus Pieter Bakker, Wilhelmus Josephus Box, Frank Jeroen Pieter Schuurmans, Jan Evert Van Der Werf | 2009-12-08 |
| 7486384 | Lithographic support structure | Patricius Aloysius Jacobus Tinnemans, Edwin Johan Buis, Sjoerd Nicolaas Lambertus Donders, Jan Frederik Hoogkamp, Aschwin Lodewijk Hendricus Johannes Van Meer +8 more | 2009-02-03 |
| 7245357 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Johannes Hubertus Josephina Moors, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens, Adrianus Mathijs Maria De Groof +3 more | 2007-07-17 |
| 6930760 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Martinus Hendrikus Antonius Leenders, Vadim Yevgenyevich Banine, Hugo Matthieu Visser, Levinus Pieter Bakker | 2005-08-16 |
| 6864957 | Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method | Peter Theodorus Maria Giesen, Jacob Jan Van der Velde | 2005-03-08 |
| 6678037 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Martinus Hendrikus Antonius Leenders, Vadim Yevgenyevich Banine, Hugo Matthieu Visser, Levinus Pieter Bakker | 2004-01-13 |