Issued Patents All Time
Showing 25 most recent of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761880 | Process-induced distortion prediction and feedforward and feedback correction of overlay errors | Pradeep Vukkadala, Haiguang Chen, Sathish Veeraraghavan | 2023-09-19 |
| 10788759 | Prediction based chucking and lithography control optimization | Bin-Ming Benjamin Tsai, Oreste Donzella, Pradeep Vukkadala | 2020-09-29 |
| 10576603 | Patterned wafer geometry measurements for semiconductor process controls | Pradeep Vukkadala | 2020-03-03 |
| 10401279 | Process-induced distortion prediction and feedforward and feedback correction of overlay errors | Pradeep Vukkadala, Haiguang Chen, Sathish Veeraraghavan | 2019-09-03 |
| 10379061 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Haiguang Chen, Sergey Kamensky, Sathish Veeraraghavan, Pradeep Vukkadala | 2019-08-13 |
| 10352691 | Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool | Haiguang Chen, Shouhong Tang, Sergey Kamensky | 2019-07-16 |
| 10330608 | Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology tools | Haiguang Chen, Sergey Kamensky | 2019-06-25 |
| 10249523 | Overlay and semiconductor process control using a wafer geometry metric | Pradeep Vukkadala, Sathish Veeraraghavan | 2019-04-02 |
| 10036964 | Prediction based chucking and lithography control optimization | Bin-Ming Benjamin Tsai, Oreste Donzella, Pradeep Vukkadala | 2018-07-31 |
| 10025894 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Pradeep Vukkadala, Sathish Veeraraghavan, Haiguang Chen, Michael D. Kirk | 2018-07-17 |
| 9865047 | Systems and methods for effective pattern wafer surface measurement and analysis using interferometry tool | Haiguang Chen, Enrique Chavez, Sathish Veeraraghavan | 2018-01-09 |
| 9779202 | Process-induced asymmetry detection, quantification, and control using patterned wafer geometry measurements | Pradeep Vukkadala, Jong Hoon Kim | 2017-10-03 |
| 9707660 | Predictive wafer modeling based focus error prediction using correlations of wafers | Pradeep Vukkadala, Wei Chang, Krishna Rao | 2017-07-18 |
| 9702829 | Systems and methods for wafer surface feature detection and quantification | Haiguang Chen, Sergey Kamensky, Enrique Chavez, Shouhong Tang, Mark Plemmons | 2017-07-11 |
| 9646379 | Detection of selected defects in relatively noisy inspection data | Haiguang Chen, Michael D. Kirk, Stephen Biellak | 2017-05-09 |
| 9632038 | Hybrid phase unwrapping systems and methods for patterned wafer measurement | Haiguang Chen | 2017-04-25 |
| 9588441 | Method and device for using substrate geometry to determine optimum substrate analysis sampling | Craig MacNaughton | 2017-03-07 |
| 9558545 | Predicting and controlling critical dimension issues and pattern defectivity in wafers using interferometry | Pradeep Vukkadala, Sathish Veeraraghavan, Soham Dey | 2017-01-31 |
| 9546862 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Haiguang Chen, Sergey Kamensky, Sathish Veeraraghavan, Pradeep Vukkadala | 2017-01-17 |
| 9513565 | Using wafer geometry to improve scanner correction effectiveness for overlay control | Craig MacNaughton, Sathish Veeraraghavan, Pradeep Vukkadala, Amir Azordegan | 2016-12-06 |
| 9430593 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Pradeep Vukkadala, Sathish Veeraraghavan, Haiguang Chen, Michael D. Kirk | 2016-08-30 |
| 9373165 | Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance | Amir Azordegan, Pradeep Vukkadala, Craig MacNaughton | 2016-06-21 |
| 9354526 | Overlay and semiconductor process control using a wafer geometry metric | Pradeep Vukkadala, Sathish Veeraraghavan | 2016-05-31 |
| 9355440 | Detection of selected defects in relatively noisy inspection data | Haiguang Chen, Michael D. Kirk, Stephen Biellak | 2016-05-31 |
| 9177370 | Systems and methods of advanced site-based nanotopography for wafer surface metrology | Haiguang Chen, Sergey Kamensky, Pradeep Vukkadala | 2015-11-03 |