Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9983489 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Christianus Wilhelmus Johannes Berendsen, Marcel Beckers, Henricus Jozef Castelijns, Adrianus Hendrik Koevoets, Leon Martin Levasier +3 more | 2018-05-29 |
| 9519224 | Lithographic apparatus and method | Arjan Gijsbertsen, Bart Peter Bert Segers, Natalia Viktorovna Davydova | 2016-12-13 |
| 8908148 | Calibration method and inspection apparatus | Gerardus Carolus Johannus Hofmans, Sven Gunnar Krister Magnusson | 2014-12-09 |
| 8436998 | Method of measuring focus of a lithographic projection apparatus | Gerardus Carolus Johannus Hofmans, Mark Zellenrath, Sven Gunnar Krister Magnusson | 2013-05-07 |
| 8289516 | Method of measuring focus of a lithographic projection apparatus | Gerardus Carolus Johannus Hofmans, Mark Zellenrath, Sven Gunnar Krister Magnusson | 2012-10-16 |