Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352049 | Plasma assisted processing chamber with separate control of species density | Gerald Yin, Arnold Kolandenko, Peter Loewenhardt, Chii Guang Lee, Yan Ye +9 more | 2002-03-05 |
| 5891350 | Adjusting DC bias voltage in plasma chambers | Evans Lee, Michael Welch, Robert Wu, Bryan Pu, Paul Luscher +2 more | 1999-04-06 |