Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7041200 | Reducing particle generation during sputter deposition | Hien Minh Le, Keith A. Miller, Kenny King-Tai Ngan | 2006-05-09 |
| 6946408 | Method and apparatus for depositing dielectric films | Hien Minh Le | 2005-09-20 |
| 6750156 | Method and apparatus for forming an anti-reflective coating on a substrate | Hien Minh Le | 2004-06-15 |
| 6312568 | Two-step AIN-PVD for improved film properties | Ingo Wilke, Rochelle King | 2001-11-06 |
| 6232665 | Silicon-doped titanium wetting layer for aluminum plug | Gongda Yao, Peijun Ding, Zheng Xu | 2001-05-15 |
| 6033541 | Deposition process for coating or filling re-entry shaped contact holes | Zheng Xu | 2000-03-07 |
| 5911113 | Silicon-doped titanium wetting layer for aluminum plug | Gongda Yao, Peijun Ding, Zheng Xu | 1999-06-08 |
| 5847461 | Integrated circuit structure having contact openings and vias filled by self-extrusion of overlying metal layer | Zheng Xu, Tse-Yong Yao, Julio Aranovich | 1998-12-08 |
| 5780357 | Deposition process for coating or filling re-entry shaped contact holes | Zheng Xu | 1998-07-14 |
| 5668055 | Method of filling of contact openings and vias by self-extrusion of overlying compressively stressed matal layer | Zheng Xu, Tse-Yong Yao, Julio Aranovich | 1997-09-16 |
| 5171412 | Material deposition method for integrated circuit manufacturing | Homoyoun Talieh, Avi Tepman, Chien Rhone Wang | 1992-12-15 |