Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5996353 | Semiconductor processing system with a thermoelectric cooling/heating device | Kenneth Maxwell | 1999-12-07 |
| 5847461 | Integrated circuit structure having contact openings and vias filled by self-extrusion of overlying metal layer | Zheng Xu, Tse-Yong Yao, Hoa Kieu | 1998-12-08 |
| 5668055 | Method of filling of contact openings and vias by self-extrusion of overlying compressively stressed matal layer | Zheng Xu, Tse-Yong Yao, Hoa Kieu | 1997-09-16 |
| 5382339 | Shield and collimator pasting deposition chamber with a side pocket for pasting the bottom of the collimator | — | 1995-01-17 |